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首页> 外文期刊>Journal of Optics >Comparative study of a standard optical steel plate surface using ellipsometry and speckle interferometry
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Comparative study of a standard optical steel plate surface using ellipsometry and speckle interferometry

机译：使用椭圆偏光法和斑点干涉法对标准光学钢板表面的比较研究

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摘要

Defected areas purposely made in a standard steel plate of the type used in optical length metrology are investigated by ellipsometric and interferometric methods. The defects range from nano-metric scratches developed by routine work usage to heavy scratches. The optical constants n and k (refractive index and extinction coefficients) of the steel platen measured at different defected areas were obtained by ellipsometry and results were used to deduce the surface roughness of the studied areas. Surface roughness measurement by speckle interferometry based on interference fringes intensities is used to evaluate the ellipsometric measurements of the same defected areas. Results of both measurements allowed us to correlate the optical constants to the roughness degree and revealed that surface defects could be evaluated by ellipsometry. A source of error in the thickness measurement of thin film arising from surface imperfection can then be quantitatively evaluated by ellipsometry. Methods of measurement, analysis, and uncertainties are presented in details.
机译：用椭圆光度法和干涉光度法研究了在光学长度计量中使用的标准钢板中特意制作的变形区域。缺陷的范围从日常工作使用中产生的纳米划痕到严重的划痕。通过椭偏仪获得了在不同缺陷区域测量的钢板的光学常数n和k（折射率和消光系数），并用其结果推论出研究区域的表面粗糙度。通过基于干涉条纹强度的斑点干涉测量法进行的表面粗糙度测量可用于评估相同缺陷区域的椭圆测量法。两次测量的结果都使我们能够将光学常数与粗糙度相关联，并表明可以通过椭偏仪评估表面缺陷。然后可以通过椭圆偏光法定量评估由于表面缺陷而引起的薄膜厚度测量中的误差来源。详细介绍了测量，分析和不确定性的方法。

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