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2D photoluminescence mapping of porous silicon using confocal technique

机译：2D使用共焦技术多孔硅的光致发光映射

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摘要

Silicon crystal in porous state can be featured by some extra optical properties. The method widely used in the literature for porous formation is anodic anodization technique due to its simplicity and ease of construction of the measurement cell. However, the porosity distribution attained by this technique strongly depends on anodization cell structure and considered conditions, thus requiring experience and care in fabrication process. Based on some fabrication tolerances and unexpected environmental conditions, surface morphology and optical activity of a created porous layer in two or three dimensions can significantly vary. This challenging circumstance thus requires some specifically designed techniques to measure and evaluate the surface morphology and optical activity of created porous layers. Confocal imaging systems commonly used in the literature for 3D imaging of biological systems due to their exceptional superior resolution, down to nanometer scale. At the same time this technique has a potential of semiconductor characterization. Recent advances in laser technology and highly accurate signal detection systems during the last decade provided significantly better signaloise ratios in confocal imaging systems. In this study, a two-dimensional optical reflection characteristic from a porous silicon is mapped using a designed confocal system with selected wavelength or photoluminescence. From the mapping, we found the following important points. First, physically unobservable non-uniform porosity formation arising from gas bubblesduring anodization process can be detected by the proposed confocal system. Second, comparison of wide- and local-area photoluminescence demonstrated that wide-area luminescence is composition of distinct local-area luminescence values from different areas.
机译：多孔状态下的硅晶体可以通过一些额外的光学性能。由于其简单性和易于构建测量细胞，所广泛地用于多孔形成的文献中的方法是阳极阳极氧化技术。然而，通过该技术获得的孔隙率分布非常取决于阳极氧化细胞结构并考虑条件，从而需要在制造过程中进行经验和护理。基于一些制造公差和意外的环境条件，两三个尺寸中产生的多孔层的表面形态和光学活性可以显着变化。因此，这种具有挑战性的环境需要一些专门设计的技术来测量和评估产生多孔层的表面形态和光学活性。常用于生物系统的3D成像的文献中常用的共焦成像系统由于它们具有卓越的卓越分辨率，降至纳米级。同时，该技术具有半导体表征的潜力。在过去十年中，激光技术和高度精确的信号检测系统的最新进展在共聚焦成像系统中提供了显着更好的信号/噪声比率。在该研究中，使用具有选择波长或光致发光的设计的共焦系统映射来自多孔硅的二维光学反射特性。从映射，我们发现以下重要点。首先，物理上不可接受的不均匀性孔隙率从气泡产生在阳极氧化过程中，可以通过提出的共焦系统检测。其次，广泛和局部光致发光的比较证明了广域发光是来自不同区域的不同局部发光值的组成。

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  • 来源
    《Journal of Optics》 |2019年第2期|214-219|共6页
  • 作者

    Atakan Abusoglu; Tevhit Karacali; Hasan Efeoglu;

  • 作者单位

    Department of Electrical and Electronics Engineering Faculty of Engineering Atatuerk University 25240 Erzurum Turkey;

    Department of Electrical and Electronics Engineering Faculty of Engineering Atatuerk University 25240 Erzurum Turkey;

    Department of Electrical and Electronics Engineering Faculty of Engineering Atatuerk University 25240 Erzurum Turkey;

  • 收录信息 美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Photoluminescence; Confocal technique; Porous silicon;

    机译：光致发光;共焦技术;多孔硅;

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