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首页> 外文期刊>Journal of thermal stresses >Analysis of the quality factor of micro-beam resonators based on heat conduction model with a single delay term
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Analysis of the quality factor of micro-beam resonators based on heat conduction model with a single delay term

机译：基于单时滞热传导模型的微束谐振器品质因数分析

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The present article investigates the quality factor of thermoelastic damping in micro-beam resonator from the standpoint of a very recent thermoelasticity theory proposed by Quintanilla (2011). In recent years, significant attention is being paid to micro- and nano-resonators due to their wide applications in micro- and nano-electromechanical systems (MEMS/NEMS). The quality performance of a micro-beam resonator is usually measured by the quality factor and thermoelastic damping is considered to be the most important intrinsic dissipative mechanism in micro and nanoscale devices. In the present article, we consider the heat conduction model with a single delay term given by Quintanilla (2011) and derive an expression for thermoelastic damping by applying complex frequency approach. The variation of thermoelastic damping versus normalized frequency and thickness of Silicon micro-beam resonator for different aspect ratios have been studied. We compare the results of present model with the corresponding results of thermoelasticity theories of type GN-III, three-phase-lag (TPL), and Lord-Shulman (LS) models and investigate that the new model with a single delay term (NMSDT) gives high Q-factor of the micro-beam resonator's sensitivity in comparison to LS and TPL models and the results under this model have more similarity to the results of GN-III model.
机译：从Quintanilla（2011）提出的最新热弹性理论的观点出发，本文研究了微束谐振器中热弹性阻尼的品质因数。近年来，由于微谐振器和纳米谐振器在微和纳米机电系统（MEMS / NEMS）中的广泛应用，引起了人们的极大关注。微束谐振器的质量性能通常由品质因数来衡量，而热弹性阻尼被认为是微米和纳米级器件中最重要的固有耗散机制。在本文中，我们考虑了Quintanilla（2011）给出的具有单个延迟项的热传导模型，并通过应用复杂频率方法导出了热弹性阻尼的表达式。研究了不同纵横比下硅微束谐振器热弹性阻尼随归一化频率和厚度的变化。我们将当前模型的结果与GN-III型，三相滞后（TPL）和Lord-Shulman（LS）模型的热弹性理论的相应结果进行了比较，并研究了具有单个延迟项的新模型（NMSDT） ）与LS和TPL模型相比，具有更高的Q因子，从而使微束谐振器的灵敏度更高，并且该模型下的结果与GN-III模型的结果更加相似。

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