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Thermoelastic damping in micromechanical circular plate resonators with radial pre-tension

机译：微机械圆形板谐振器中的热弹性阻尼，径向预张力

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摘要

Thermoelastic damping (TED) is one of the main energy dissipation mechanisms in microano resonators and one of the major concerns in respect to performance of micro-electromechanical systems and nano-electromechanical systems devices. In this article, we report that application of pre-tension stress on microano circular plate resonators not only increases the resonant frequency, but also reduces TED. Analytical expressions of TED in micro-plate resonators, subjected to uniform radial pre-tension stress around its edge, are derived by means of thermal energy method. Thermal conductions along both the thickness direction and the radial direction are taken into account. TED obtained by using 2-D thermal conduction model is expressed in the form of infinite series and the convergence of the series is also discussed. Numerical results show that application of pre-tension is able to considerably reduce TED of micro-plate resonators. The effects of the dimensions, ratio of thickness to radius and vibration modes of circular plate resonators on TED are examined. This study indicates that application of pretension in micromechanical resonators could be a viable means to modulate resonant frequency and TED.
机译：热弹性阻尼（TED）是微/纳米谐振器中的主要能量耗散机制之一，以及关于微机电系统和纳米机电系统装置的性能的主要问题之一。在本文中，我们报告说，在微/纳米圆形板谐振器上施加预张力应力不仅增加了谐振频率，而且还减少了TED。通过热能方法围绕其边缘围绕其边缘围绕其边缘呈均匀的径向张力应力进行微板谐振器的分析表达。考虑沿厚度方向和径向的热量。通过使用2-D热导通模型获得的TED以无限系列的形式表示，并且还讨论了该系列的收敛性。数值结果表明，施加预张力的应用能够显着减少微板谐振器的TED。检查尺寸的效果，厚度与圆形板谐振器的圆半径和振动模式的效果。本研究表明，微机械谐振器中的预张力的施加可以是调节谐振频率和TED的可行方法。

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  • 来源
    《Journal of thermal stresses》 |2020年第3期|175-190|共16页
  • 作者

    Ma Chengzhong; Chen Siyu; Guo Fenglin;

  • 作者单位

    Shanghai Jiao Tong Univ Sch Naval Architecture Ocean & Civil Engn State Key Lab Ocean Engn Shanghai 200240 Peoples R China;

    Shanghai Jiao Tong Univ Sch Naval Architecture Ocean & Civil Engn State Key Lab Ocean Engn Shanghai 200240 Peoples R China|Tsinghua Univ Dept Engn Mech Beijing 100084 Peoples R China;

    Shanghai Jiao Tong Univ Sch Naval Architecture Ocean & Civil Engn State Key Lab Ocean Engn Shanghai 200240 Peoples R China|Shanghai Jiao Tong Univ Collaborat Innovat Ctr Adv Ship & Deep Sea Explor Shanghai Peoples R China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    2-D thermal conduction model; micro; nano circular plate resonator; pre-tension stress; thermoelastic damping;

    机译：2-D热传导模型;微型;纳米圆形板谐振器;预张力应力;热弹性阻尼;

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