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首页> 外文期刊>Journal of thermal stresses >LARGE-DEFLECTION EFFECT ON THERMOELASTIC DISSIPATION OF MICROBEAM RESONATORS
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LARGE-DEFLECTION EFFECT ON THERMOELASTIC DISSIPATION OF MICROBEAM RESONATORS

机译：大挠度对微束谐振器热弹性耗散的影响

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摘要

In real applications, beam resonators in MEMSINEMS often vibrate beyond the linear regime. The present paper aims to study the effect of large-deflection on thermoelastic dissipation of doubly-clamped microbeam resonators. Detailed formulas are derived for quality (Q-) factor due to thermoelastic dissipation which depends on the amplitude of vibration deflection. Under adiabatic or isothermal surface thermal conditions, the nonlinear effect of large-deflection on thermoelastic dissipation is demonstrated with a comparison to the results based on linearized small deflection vibration. Our results show that thermoelastic dissipation is reduced monotonically with increasing amplitude of vibration deflection under adiabatic surface condition, while thermoelastic dissipation is increased monotonically with increasing amplitude under isothermal surface condition. Under both adiabatic and isothermal surface conditions, the large-deflection effect on thermoelastic dissipation becomes more significant for higher vibration frequencies than lower ones. For the first time to the best of our knowledge, these results reveal that large deflection has a significant effect on thermoelastic dissipation of microbeam resonators and surface thermal condition plays an important role in the large-deflection effect.
机译：在实际应用中，MEMSINEMS中的束谐振器经常振动超过线性范围。本文旨在研究大挠度对双钳位微束谐振器热弹性耗散的影响。归因于热弹性耗散的质量（Q-）因子的详细公式，其取决于振动挠度的幅度。在绝热或等温表面热条件下，与基于线性化小挠度振动的结果进行比较，证明了大挠度对热弹性耗散的非线性影响。我们的结果表明，在绝热表面条件下，热弹性耗散随振动挠度的增加而单调减少，而在等温表面条件下，热弹性耗散随振幅的增加而单调增加。在绝热和等温表面条件下，较高的振动频率对热弹性耗散的大挠度效应要比较低的振动频率大。据我们所知，这是第一次，大挠度对微束谐振器的热弹性耗散有显着影响，表面热条件在大挠度效应中起着重要作用。

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