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首页> 外文期刊>Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films >Roll-to-roll sputtered Si-doped In2O3/Ag/Si-doped In2O3 multilayer as flexible and transparent anodes for flexible organic solar cells
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Roll-to-roll sputtered Si-doped In2O3/Ag/Si-doped In2O3 multilayer as flexible and transparent anodes for flexible organic solar cells

机译：卷对卷溅射Si掺杂In 2 O 3 / Ag / Si掺杂In 2 O 3 多层用作柔性有机太阳能电池的柔性和透明阳极

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摘要

Amorphous Si-doped InO (a-ISO), crystalline Ag, and a-ISO layers were sputtered onto a flexible polyethylene terephthalate substrate by using a lab-scale roll-to-roll (RTR) sputtering system. The resulting a-ISO/Ag/a-ISO multilayer was studied to optimize their characteristics for use as flexible and transparent anodes in flexible organic solar cells (FOSCs). To optimize the electrical and optical properties of the a-ISO/Ag/a-ISO multilayer, the thicknesses of each a-ISO and Ag layer were varied by controlling the DC power applied on ISO and Ag targets during the RTR sputtering process. Compared to the top and bottom a-ISO layer, controlling the thickness of the Ag layer is more effective for realizing a low sheet resistance and high transmittance a-ISO/Ag/a-ISO multilayer. At optimized thicknesses of a-ISO (30 nm) and Ag (10 nm), a symmetric a-ISO/Ag/a-ISO multilayer showed a sheet resistance of 5.256 Ω/sq and a high optical transmittance of 83.9%. Various bending test results showed that the high failure strain of the Ag interlayer led to good flexibility of the multilayer films. Furthermore, the authors discuss the effect of each a-ISO and Ag layer thickness on the performance of FOSCs fabricated on RTR-sputtered a-ISO/Ag/a-ISO anodes.
机译：通过使用实验室规模的卷对卷（RTR）溅射系统，将非晶硅掺杂的InO（a-ISO），晶体Ag和a-ISO层溅射到柔性聚对苯二甲酸乙二醇酯基板上。研究了所得的a-ISO / Ag / a-ISO多层膜，以优化其特性，以用作柔性有机太阳能电池（FOSC）中的柔性和透明阳极。为了优化a-ISO / Ag / a-ISO多层膜的电学和光学性能，通过控制RTR溅射过程中施加在ISO和Ag靶上的直流电，可以改变a-ISO和Ag层的厚度。与顶部和底部a-ISO层相比，控制Ag层的厚度对于实现低薄层电阻和高透射率a-ISO / Ag / a-ISO多层膜更为有效。在a-ISO（30 nm）和Ag（10 nm）的最佳厚度下，对称的a-ISO / Ag / a-ISO多层膜显示出5.256Ω/ sq的薄层电阻和83.9％的高透光率。各种弯曲试验结果表明，Ag中间层的高破坏应变导致多层膜的良好挠性。此外，作者讨论了每个a-ISO和Ag层厚度对在RTR溅射的a-ISO / Ag / a-ISO阳极上制造的FOSC的性能的影响。

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