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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

SCIEICA

中文名称：真空科学与技术杂志技术A：真空，表面和薄膜

ISSN：0734-2101
出版周期：

发文量：1150

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1.Differential etching behavior between semi-insulating and n-doped 4H-SiC in high-density SF_(6)/O_(2) inductively coupled plasma
- 作者：Naoya Okamoto
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2.Monolithic integration of rare-earth oxides and semiconductors for on-silicon technology
- 作者：Dargis Rytis;Clark Andrew;Arkun Fevzi ErdemGrinys TomasTomasiunas RolandasOHara AndyDemkov Alexander A.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
3.Influence of dosing sequence and film thickness on structure and resistivity of Al-ZnO films grown by atomic layer deposition
- 作者：Pollock Evan B.;Lad Robert J.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
4.Nonisostructural complex oxide heteroepitaxy
- 作者：Wong Franklin J.;Ramanathan Shriram
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
5.Negative ion beam bombardment of a protic ionic liquid: Alleviating surface charging and damage and analyzing the surface of organic insulating materials
- 作者：Fujiwara Yukio;Saito Naoaki
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
6.Structure and stability of van der Waals layered group-IV monochalcogenides
- 作者：Jai Likith Sri Ranga;Ciobanu Cristian V.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
7.David Shirley: Pioneer, teacher, mentor, and visionary scientific leader
- 作者：Kevan Stephen D.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
8.Step-type and step-density influences on CO adsorption probed by reflection absorption infrared spectroscopy using a curved Pt(111) surface
- 作者：Walsh Anton J.;van Lent Richard;Auras Sabine V.Gleeson Michael A.Berg Otto T.Juurlink Ludo B. F.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
9.Deep UV AlGaN LED reliability for long duration space missions
- 作者：Letson Benjamin C.;Barke Simon;Wass PeterMueller GuidoRen FanPearton Stephen J.Conklin John W.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2023年第1期
- DEGRADATION;
- GENERATION;
- LISA;
10.Voltage waveform tailoring for high aspect ratio plasma etching of SiO2 using Ar/CF4/O-2 mixtures: Consequences of ion and electron distributions on etch profiles
- 作者：Krueger Florian;Lee Hyunjae;Nam Sang KiKushner Mark J.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2023年第1期
- CHEMISTRY;
11.Effects of outgassing of loader chamber walls on hydriding of thin films for commercial applications
- 作者：Provo James L.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
12.Atomic layer etching of titanium nitride with surface modification by Cl radicals and rapid thermal annealing
- 作者：Miyoshi Nobuya;McDowell Nicholas;Kobayashi Hiroyuki
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- OXIDATION;
- FLUORINATION;
- TIN;
- CHEMISTRY;
- FILMS;
13.Improved characteristics of mesa-type intrinsic Josephson junctions by vacuum cleavage process for Bi_(2)Sr_(2)CaCu_(2)O_(8+delta)/Au contacts
- 作者：Hiroki Ishida;Takahiro Kato;Atsushi SaitoKanji Yasui
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2012年第3期
14.Surface degradation of uranium tetrafluoride
- 作者：Tobin J. G.;Duffin A. M.;Yu S. -W.Qiao R.Yang W. L.Booth C. H.Shuh D. K.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
15.Investigation of crystal structure and optical properties of Cd_(1-x)Mn_(x)S epilayers
- 作者：D. J. Kim;Y. D. Choi;J. W. Lee
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2011年第5期
16.Optimization of chemical mechanical polishing of (010) beta-Ga2O3
- 作者：Liao Michael E. E.;Huynh Kenny;Matto LezliLuccioni Dorian P.Goorsky Mark S.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2023年第1期
- MATERIAL REMOVAL;
- PARTICLE-SIZE;
- DEPENDENCIES;
- WAFER;
- MODEL;
17.Detailed analysis of impact collision ion scattering spectroscopy of bismuth selenide
- 作者：Zhou Weimin;Zhu Haoshan;Yarmoff Jory A.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
18.Dependence of film texture on substrate and growth conditions for CdTe films deposited by close-spaced sublimation
- 作者：Junning Gao;Wanqi Jie;Yanyan YuanTao WangGangqiang ZhaJunli Tong
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2011年第5期
19.CF4 plasma-based atomic layer etching of Al2O3 and surface smoothing effect
- 作者：Chen Chien-Wei;Cho Wen-Hao;Chang Chan-YuenSu Chien-YingChu Nien-NanKei Chi-ChungLi Bor-Ran
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2023年第1期
- DENSITY-FUNCTIONAL THEORY;
- SEQUENTIAL EXPOSURES;
- ALUMINUM-OXIDE;
- MECHANISM;
- FLUORINATION;
- TRIMETHYLALUMINUM;
- SN(ACAC)(2);
- DEPOSITION;
- OXIDATION;
- FLUORIDE;
20.Early stage nucleation mechanism for SiC(0001) surface epitaxial growth
- 作者：Ai Wensen;Chen Xuejiang;Feng Jianmei
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- CHEMICAL-VAPOR-DEPOSITION;
- MONTE-CARLO-SIMULATION;
- SIC 0001;
- CRYSTAL-GROWTH;
- THIN-FILMS;
- GRAPHENE;
- KINETICS;
- HOMOEPITAXY;
- PERCOLATION;
- MORPHOLOGY;
21.Precision plasma etching of Si, Ge, and Ge: P by SF6 with added O-2
- 作者：Wongwanitwattana Chalermwat;Shah Vishal A.;Myronov MaksymParker Evan H. C.Whall TerryLeadley David R.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第3期
22.Ion energy distributions, electron temperatures, and electron densities in Ar, Kr, and Xe pulsed discharges
- 作者：Hyungjoo Shin;Weiye Zhu;Demetre J. EconomouVincent M. Donnelly
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2012年第3期
23.Review of major technologies improving surface performances of Ti alloys for implant biomaterials
- 作者：Liang S. X.;Liu K. Y.;Yin L. X.Huang G. W.Shi Y. D.Zheng L. Y.Xing Z. G.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
24.Comparative study of GaN mesa etch characteristics in Cl-2 based inductively coupled plasma with Ar and BCl3 as additive gases
- 作者：Rawal Dipendra Singh;Arora Henika;Sehgal Bhupender KumarMuralidharan Rangarajan
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第3期
25.Modification of beta-gallium oxide electronic properties by irradiation with high-energy electrons
- 作者：Dang T-Huong;Konczykowski M.;Jaffres H.Safarov V. IDrouhin H-J
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- BETA-GA2O3 CRYSTALS;
- LUMINESCENCE;
- POLARIZATION;
- CENTERS;
- ORIGIN;
26.Practical guide to understanding goodness-of-fit metrics used in chemical state modeling of x-ray photoelectron spectroscopy data by synthetic line shapes using nylon as an example
- 作者：Fairley Neal;Bargiela Pascal;Roberts AdamFernandez VincentBaltrusaitis Jonas
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2023年第1期
- UNCERTAINTIES;
- XPS;
- AES;
27.Atomic layer etching of 3D structures in silicon: Self-limiting and nonideal reactions
- 作者：Huard Chad M.;Zhang Yiting;Sriraman SaravanapriyanPaterson AlexKanarik Keren J.Kushner Mark J.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
28.Structure and electrical properties of Nb-Ge-C nanocomposite coatings
- 作者：Tengstrand Olof;Nedfors Nils;Fast LarsFlink AxelJansson UlfEklund PerHultman Lars
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
29.Elaboration and characterization of porous ultrathin gold films grown by ion beam assisted deposition
- 作者：Aassime A.;Duquennoy M.;Hamouda F.Kadi T.Mahut F.Ouaftouh M.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
30.Crystal structure analysis of stacking faults through scanning transmission electron microscopy of beta-Ga2O3 (001) layer grown via halide vapor phase epitaxy
- 作者：Ogawa Kenichi;Kobayashi Kenji;Hasuike NoriyukiIsshiki Toshiyuki
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
31.Fundamental issues in wafer bonding
- 作者：U. Gosele;Y. Bluhm;G. KastnerP. KopperschmidtG. KrauterR. ScholzA. SchumacherSt. SenzQ.-Y. TongL.-J. HuangY.-L. ChaoT. H. Lee
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 1999年第4aptai期
32.Infrared spectroscopy study of adsorption and photodecomposition of formic acid on reduced and defective rutile TiO2 (110) surfaces
- 作者：Mattsson Andreas;Hu Shuanglin;Hermansson KerstiOsterlund Lars
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第6期
33.On the nature and propagation of errors in roughness parameters obtained from spectral analysis of atomic force microscopy topographic images
- 作者：Chrostowski Robert;Mangolini Filippo
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
34.Shape-memory alloy rings as tight couplers between ultrahigh-vacuum pipes: Design and experimental assessment
- 作者：Niccoli Fabrizio;Garion Cedric;Maletta CarmineChiggiato Paolo
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
35.Technical and personal remembrances of David A. Shirley in studies of surface magnetism, photoelectron spectroscopy, EUV lithography, and hydrogen storage
- 作者：Klebanoff L. E.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
36.Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
- 作者：Altuntas Halit;Donmez Inci;Ozgit-Akgun CaglaBiyikli Necmi
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
37.Variation in the density, optical polarizabilities, and crystallinity of TiO2 thin films deposited via atomic layer deposition from 38 to 150 degrees C using the titanium tetrachloride-water reaction
- 作者：Piercy Brandon D.;Leng Collen Z.;Losego Mark D.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
38.Surface chemistry of a Cu(I) beta-diketonate precursor and the atomic layer deposition of Cu2O on SiO2 studied by x-ray photoelectron spectroscopy
- 作者：Dhakal Dileep;Waechtler Thomas;Schulz Stefan E.Gessner ThomasLang HeinrichMothes RobertTuchscherer Andre
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
39.Finite-element simulation models and experimental verification for through-silicon-via etching: Bosch process and single-step etching
- 作者：Ouyang Zihao;Xu Wenyu;Ruzic D. N.Kiehlbauch MarkSchrinsky AlexTorek Kevin
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
40.Optical characteristics of nanocrystalline AlxGa1-xN thin films deposited by hollow cathode plasma-assisted atomic layer deposition
- 作者：Goldenberg Eda;Ozgit-Akgun Cagla;Biyikli NecmiOkyay Ali Kemal
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第3期
41.Relationship between local coordinates and thermal conductivity in amorphous carbon
- 作者：Minamitani Emi;Shiga Takuma;Kashiwagi MakotoObayashi Ippei
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- DIAMOND-LIKE CARBON;
- DYNAMICS;
- FILMS;
- HYDROCARBONS;
- HOMOLOGY;
- ORDER;
42.Vibrational spectroscopy of low-k/ultra-low-k dielectric materials on patterned wafers
- 作者：Jeffrey C. K. Lam;Maggie Y. M. Huang;Hao TanZhiqiang MoZhihong MaiChoun Pei WongHandong SunZexiang Shen
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2011年第5期
43.Reactive high-power impulse magnetron sputtering of ZrO2 films with gradient ZrOx interlayers on pretreated steel substrates
- 作者：Belosludtsev Alexandr;Vlcek Jaroslav;Houska JiriCerstvy Radomir
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
44.Degradation of methylene blue by pulsed nanosecond discharge in Ar, O2, and N2 gaseous bubbles in water: Evaluation of direct and postprocessing modes
- 作者：Bourbeau Naomi;Soussan Laure;Hamdan Ahmad
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
45.Effect of WN content on toughness enhancement in V1-xWxN/MgO(001) thin films
- 作者：Kindlund H.;Sangiovanni D. G.;Lu J.Jensen J.Chirita V.Petrov I.Greene J. E.Hultman L.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第3期
46.Synthesis of ultrathin heteroepitaxial 3C-SiC films by pyrolysis of molecular layer deposition polyamide films on Si
- 作者：Amashaev Rustam R.;Alikhanov Nariman M.-R.;Ismailov Abubakar M.Abdulagatov Ilmutdin M.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
47.Molecular beam epitaxy growth of PbSe on Si (211) using a ZnTe buffer layer
- 作者：X. J. Wang;Y. Chang;Y. B. HouC. R. BeckerR. KodamaF. AqaridenS. Sivananthan
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2011年第5期
48.Dependence of film structure on the film structure-independent equivalent film thickness in magnetron sputtering deposition of Ag thin films
- 作者：Kusano Eiji
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
49.Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications
- 作者：Dey Sonal;Yu Kai-Hung;Consiglio StevenTapily KandabaraHakamata TakahiroWajda Cory S.Leusink Gert J.Jordan-Sweet JeanLavoie ChristianMuir DavidMoreno BeatrizDiebold Alain C.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
50.Effect of V/III ratio and growth pressure on surface and crystal quality of AlN grown on sapphire by metal-organic chemical vapor deposition
- 作者：Streicher Isabel;Leone Stefano;Kirste LutzAmbacher Oliver
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- EPITAXIAL-GROWTH;
- TEMPERATURE;
- MORPHOLOGY;
- REDUCTION;
- PROSPECTS;
51.Imaging and phase identification of Cu_(2)ZnSnS_(4) thin films using confocal Raman spectroscopy
- 作者：A.-J. Cheng;M. Manno;A. KhareC. LeightonS. A. CampbellE. S. Aydil
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2011年第5期
52.Quasiatomic layer etching of silicon oxide selective to silicon nitride in topographic structures using fluorocarbon plasmas
- 作者：Wang Mingmei;Ventzek Peter L. G.;Ranjan Alok
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
53.Fabrication and characterization of silver- and copper-coated Nylon 6 forcespun nanofibers by thermal evaporation
- 作者：Mihut Dorina M.;Lozano Karen;Foltz Heinrich
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第6期
54.Comprehensive computer model for magnetron sputtering. II. Charged particle transport
- 作者：Jimenez Francisco J.;Dew Steven K.;Field David J.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第6期
55.Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges
- 作者：H. B. Profijt;S. E. Potts;M. C. M. van de SandenW. M. M. Kessels
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56.Atomic force microscopy and x-ray diffraction studies on agglomeration phenomena of ultrathin Au/Fe bilayers
- 作者：Masao Kamiko;Jung-Woo Koo;Jae-Min KimJae-Geun Ha
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57.Erratum: “Practical guide for curve fitting in x-ray photoelectron spectroscopy” J. Vac. Sci. Technol. A 38, 061203 (2020)
- 作者：Major George H.;Fairley Neal;Sherwood Peter M. A.Linford Matthew R.Terry JeffFernandez VincentArtyushkova Kateryna
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58.Plasma-enhanced atomic layer deposition of WO3-SiO2 films using a heteronuclear precursor
- 作者：Mullapudi Kamesh;Holden Konner E. K.;Peterson Jessica L.Dezelah Charles L.Moser Daniel F.Kanjolia Ravindra K.Tweet Douglas J.Conley John F. Jr.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2023年第1期
- OXIDE THIN-FILMS;
- TUNGSTEN-OXIDE;
- OPTICAL-PROPERTIES;
- WATER;
- MOLYBDENUM;
- TRIOXIDE;
- WO3;
- TRANSITIONS;
- FABRICATION;
- OXIDATION;
59.Selective vapor sensors with thin-film MoS2-coated optical fibers
- 作者：Motala Michael;Beagle Lucas K.;Lynch JasonMoore David C.Stevenson Peter R.Benton AnnaTran Ly D.Baldwin Luke A.Austin DrakeMuratore ChristopherJariwala DeepGlavin Nicholas R.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- SURFACE-PLASMON RESONANCE;
- HUMAN BREATH;
- INTERCALATION;
- POLYANILINE;
- TEMPERATURE;
- MOS2;
- FABRICATION;
- POLYMERS;
- MODE;
60.Calibration of tip and sample temperature of a scanning tunneling microscope using a superconductive sample
- 作者：Stocker Matthias;Pfeifer Holger;Koslowski Berndt
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第3期
61.Surface passivation of Fe3O4 nanoparticles with Al2O3 via atomic layer deposition in a rotating fluidized bed reactor
- 作者：Duan Chen-Long;Deng Zhang;Cao KunYin Hong-FengShan BinChen Rong
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2016年第4期
62.Potential for reactive pulsed-dc magnetron sputtering of nanocomposite VOx microbolometer thin films
- 作者：Jin Yao O.;Ozcelik Adem;Horn Mark W.Jackson Thomas N.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第6期
63.Investigation on dielectric properties of atomic layer deposited Al2O3 dielectric films
- 作者：Yildiz Dilber Esra;Yildirim Mert;Gokcen Muharrem
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第3期
64.Optimization of a plasma immersion ion implantation process for shallow junctions in silicon
- 作者：Ray Ashok;Nori Rajashree;Bhatt PiyushLodha SaurabhPinto RichardRao Valipe RamgopalJomard FrancoisNeumann-Spallart Michael
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第6期
65.Thermal stability and mechanical properties of amorphous coatings in the Ti-B-Si-Al-N system grown by cathodic arc evaporation from TiB2, Ti33Al67, and Ti85Si15 cathodes
- 作者：Fager Hanna;Andersson Jon M.;Jensen JensLu JunHultman Lars
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第6期
66.In situ studies on atomic layer etching of aluminum oxide using sequential reactions with trimethylaluminum and hydrogen fluoride
- 作者：Reif Johanna;Knaut Martin;Killge SebastianAlbert MatthiasMikolajick ThomasBartha Johann W.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- SELF-LIMITING FLUORINATION;
- THERMAL-REACTIONS;
- GROWTH;
- SN(ACAC)(2);
- DEPOSITION;
- MECHANISM;
- GAAS;
- ELLIPSOMETRY;
- CHEMISTRY;
67.Electrical conductance behavior of thin Ni catalyst films during intermittent direct current magnetron sputtering
- 作者：Kusumoto Yuji;Furuta Hiroshi;Sekiya KazukiKoji HirofumiHatta Akimitsu
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第3期
68.Evolving surface morphology during epitaxy of NiO on Ag(001)
- 作者：Goldbach Hanno D.;Wollschlaeger Joachim
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- SCANNING-TUNNELING-MICROSCOPY;
- ENERGY-ELECTRON DIFFRACTION;
- ULTRATHIN FILMS;
- NICKEL-OXIDE;
- MGO FILMS;
- GROWTH;
- LAYERS;
- NI/AG(100);
- EVOLUTION;
- NIO(100);
69.Magnetron sputtered NiAl/TiBx multilayer thin films
- 作者：Wojcik Tomasz;Ott Vincent;Oezbilen SedatLeiste HaraldUlrich SvenMayrhofer Paul HeinzRiedl HelmutStueber Michael
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
70.Effect of copper emitted from wafers on etch rates of insulator films in capacitively coupled fluorocarbon plasma
- 作者：Shin-ichi Imai
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2009年第1期
71.Sympetalous defects in metalorganic vapor phase epitaxy (MOVPE)-grown homoepitaxial beta-Ga2O3 films
- 作者：Cooke Jacqueline;Ranga Praneeth;Bhattacharyya ArkkaCheng XuelingWang YunshanKrishnamoorthy SriramScarpulla Michael A.Sensale-Rodriguez Berardi
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2023年第1期
- V-DEFECTS;
- MECHANISM;
72.High performance flexible copper indium gallium selenide core-shell nanorod array photodetectors
- 作者：Badradeen Emad;Brozak Matthew;Keles FilizAl-Mayalee KhalidahKarabacak Tansel
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
73.Influence of pulse power amplitude on plasma properties and film deposition in high power pulsed plasma enhanced chemical vapor deposition
- 作者：Lundin Daniel;Jensen Jens;Pedersen Henrik
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第3期
74.Microstructure of surface cerium hydride growth sites
- 作者：Brierley Martin;Knowles John;Montgomery NeilPreuss Michael
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第3期
75.Low temperature plasma-enhanced atomic layer deposition of sodium phosphorus oxynitride with tunable nitrogen content
- 作者：Fontecha Daniela;Nuwayhid R. Blake;Kozen Alexander C.Stewart David M.Rubloff Gary W.Gregorczyk Keith E.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- SOLID-STATE BATTERIES;
- CONDUCTIVITY;
- PRECURSORS;
- GROWTH;
76.Comparison of precursor infiltration into polymer thin films via atomic layer deposition and sequential vapor infiltration using in-situ quartz crystal microgravimetry
- 作者：Padbury Richard P.;Jur Jesse S.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
77.Reactive sputtering of delta-ZrH2 thin films by high power impulse magnetron sputtering and direct current magnetron sputtering
- 作者：Hogberg Hans;Tengdelius Lina;Samuelsson MattiasEriksson FredrikBroitman EstebanLu JunJensen JensHultman Lars
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
78.On the interplay between a novel iron and iron-carbide atomic layer deposition process, the carbon nanotube growth, and the metal-carbon nanotube coating properties on silica substrates
- 作者：da Cunha Tairan;Adjeroud Noureddine;Guillot JeromeDuez BenoitLenoble DamienArl Didier
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- CATALYST PARTICLE-SIZE;
- DIOXIDE THIN-FILMS;
- PLATINUM NANOPARTICLES;
- MAGNETIC-PROPERTIES;
- ISLAND GROWTH;
- NITRIDE;
- WATER;
- FE;
- DECOMPOSITION;
- MICROTUBULES;
79.Silicon etch using SF6/C4F8/Ar gas mixtures
- 作者：Bates Robert L.;Thamban P. L. Stephan;Goeckner Matthew J.Overzet Lawrence. J.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
80.Electrochemical characteristics of plasma-etched black silicon as anodes for Li-ion batteries
- 作者：Lee Gibaek;Schweizer Stefan L.;Wehrspohn Ralf B.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第6期
81.Modelling of fluorine based high density plasma for the etching of silica glasses
- 作者：Ludovic Lallement;Ahmed Rhallabi;Christophe CardinaudMarie Claude Peignon Fernandez
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2011年第5期
82.Gettering of hydrogen and methane from a helium gas mixture
- 作者：Cardenas Rosa Elia;Stewart Kenneth D.;Cowgill Donald F.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第6期
83.Investigations of a method for determining pumping speed and sorption capacity of nonevaporable getters based on in situ calibrated throughput
- 作者：Bojan Erjavec;Janez Setina
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2011年第5期
84.Temporal evolution of the ion flux to the target in rotational RF multimagnetron plasma
- 作者：Ohtsu Yasunori;Yasuda Koya;Schulze Julian
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
85.Chemical vapor deposition of sp(2)-boron nitride films on Al2O3 (0001), (11 2 over bar 0), (1 1 over bar 02), and (10 1 over bar 0) substrates
- 作者：Sharma Sachin;Souqui Laurent;Pedersen HenrikHoegberg Hans
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- RHOMBOHEDRAL BORON-NITRIDE;
- ALUMINUM NITRIDE;
- GROWTH;
- ALN;
- CVD;
86.Optical constants of single-crystalline Ni(100) from 77 to 770 K from ellipsometry measurements
- 作者：Abadizaman Farzin;Love Jaden;Zollner Stefan
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- BAND-STRUCTURE;
- TEMPERATURE-DEPENDENCE;
- ELECTRICAL-RESISTANCE;
- FERROMAGNETIC METALS;
- ELECTRONIC-STRUCTURE;
- FERMI-SURFACE;
- NICKEL;
- RESISTIVITY;
- ENERGY;
- PHOTOEMISSION;
87.Ion beam assisted organic chemical vapor etch of magnetic thin films
- 作者：Chen Jack Kun-Chieh;Kim Taeseung;Altieri Nicholas D.Chen ErnestChang Jane P.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2017年第3期
88.First principles study on the lattice thermal conductivity of α-phase Ga2O3
- 作者：Yang Gang;Romeo Pedro Rojo;Apostoluk AleksandraVilquin Bertrand
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
89.Atomically precise deposition of (Er0.1Y0.9)2SiO5 combined with digitally processed DC sputtering and non-radical oxidation
- 作者：Nakamura Ghent;Isshiki Hideo
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第5期
90.Anisotropic etching induced by surface energy driven agglomeration
- 作者：Soon Jung Jung;Tarek Lutz;John J. Boland
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2011年第5期
91.Electron-stimulated desorption from polished and vacuum fired 316LN stainless steel coated with Ti-Zr-Hf-V
- 作者：Malyshev Oleg B.;Valizadeh Reza;Hogan Benjamin T.Hannah Adrian N.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第6期
92.Effects on graphene of electron irradiation at 25 keV and dosages up to 10(18) electrons/cm(2)
- 作者：Ojo I. A.;Hathaway E.;Gonzalez R. R.Adhikari P. R.Sathish V.Kunam B.Khalid Y.Cui J.Choi W.Perez J. M.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2023年第1期
- HYDROGENATED GRAPHENE;
- RAMAN-SPECTROSCOPY;
- DEFECTS;
93.Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature
- 作者：Kalanov Dmitry;Unutulmazsoy Yeliz;Spemann DanielBauer JensAnders AndreBundesmann Carsten
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- OPTICAL-PROPERTIES;
- BETA-GA2O3 LAYERS;
- GA2O3;
- SI;
- MORPHOLOGY;
- SILICON;
94.Effect of process parameters on properties of argon-nitrogen plasma for titanium nitride film deposition (vol 31, 061307, 2013)
- 作者：Saikia Partha;Kakati Bharat
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第4期
95.Quantitative detection of tiny amounts of helium isotopes in a hydrogen isotope atmosphere using a standard-resolution quadrupole mass spectrometer
- 作者：A. Frattolillo;A. De Ninno;A. Rizzo
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2007年第26期
96.Phosphor coatings to enhance Si photovoltaic cell performance
- 作者：Philip Chung;Hsiu-hsin Chung;Paul H. Holloway
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2007年第26期
97.Effect of substrate and substrate temperature on the deposition of MoS2 by radio frequency magnetron sputtering
- 作者：Rigi Valiyaparambil J. Cicily;Jayaraj Madambi K.;Saji Kachirayil J.
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- CHEMICAL-VAPOR-DEPOSITION;
- FEW-LAYER MOS2;
- MONOLAYER MOS2;
- SINGLE-LAYER;
- LARGE-SCALE;
- GROWTH;
- PHOTOLUMINESCENCE;
- THICKNESS;
- RAMAN;
- TRANSISTORS;
98.Ag:TiN nanocomposite thin films for bioelectrodes: The effect of annealing treatments on the electrical and mechanical behavior
- 作者：Pedrosa Paulo;Machado Diogo;Evaristo ManuelCavaleiro AlbanoFonseca CarlosVaz Filipe
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2014年第3期
99.Who were the founders of synchrotron radiation? Historical facts and misconceptions
- 作者：Margaritondo Giorgio
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2022年第3期
- ELECTRONS;
- ACCELERATION;
- ENERGY;
- LIGHT;
100.Photovoltaic characteristics of a-Si/beta-FeSi_(2)/c-Si double heterojunction fabricated by magnetron sputtering
- 作者：Jiaxiong Xu;Ruohe Yao;Kuiwei Geng
- 期刊名称：《Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films》 | 2011年第5期

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