Ideally ordered 10 nm channel arrays grown by anodization of focused-ion-beam patterned aluminum

C. Y. Peng; C. Y. Liu; N. W. Liu; H. H. Wang; A. Datta; Y. L. Wang

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Ideally ordered 10 nm channel arrays grown by anodization of focused-ion-beam patterned aluminum

机译：通过聚焦离子束图案化铝的阳极氧化工艺生长的理想有序10 nm通道阵列

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摘要

Arrays of ideally ordered alumina nanochannels with unprecedented ～10 nm pore size, 40-50 nm interpore spacing, and improved channel uniformity have been fabricated by anodizing an aluminum substrate with a guiding pattern on its surface. The pattern is an array of hexagonally close-packed concaves fabricated by focused ion beam direct sputtering; and its lattice constant is carefully matched to the conditions of the subsequent anodization process in order to achieve effective guiding in the growth of the nanochannels and therefore the ordering of an array.

机译：通过阳极氧化在其表面具有引导图案的铝基板，可以制造出具有理想的有序氧化铝纳米通道的阵列，这些纳米通道具有前所未有的〜10 nm的孔径，40-50 nm的孔间距以及改善的通道均匀性。图案是通过聚焦离子束直接溅射制成的六角形密堆积凹面的阵列。并且其晶格常数与后续阳极氧化工艺的条件仔细匹配，以实现对纳米通道生长的有效引导，从而实现阵列的有序化。

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《Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures》 |2005年第2期|p.559-562|共4页
作者
C. Y. Peng; C. Y. Liu; N. W. Liu; H. H. Wang; A. Datta; Y. L. Wang;
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作者单位

Physics Department, National Taiwan University, Taipei, Taiwan and Institute of Atomic and Molecular Sciences, Academia Sinica, P. O. Box 23-166, Taipei 106, Taiwan;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类工程物理学;
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专利

1. Order-disorder transition of anodic alumina nanochannel arrays grown under the guidance of focused-ion-beam patterning [J] . C. Y. Liu, A. Datta, N. W. Liu, Applied Physics Letters . 2004,第14期

机译：在聚焦离子束构图指导下生长的阳极氧化铝纳米通道阵列的有序无序过渡
2. Nanometer-Scale Patterning of DNA in Controlled Intervals on a Gold-Disk Array Fabricated Using Ideally Ordered Anodic Porous Alumina [J] . Futoshi Matsumoto, Masahiro Harada, Kazuyuki Nishio, Advanced Materials . 2005,第13期

机译：使用理想有序阳极多孔氧化铝制造的金盘阵列上可控间隔中DNA的纳米级图案
3. Ideally Ordered, High-Density Patterning of DNA on Au Disk Array Fabricated Using Anodic Porous Alumina [J] . Futoshi MATSUMOTO, Kazuyuki NISHIO, Tsutomu MIYASAKA, Japanese Journal of Applied Physics. Part 2, Letters . 2004,第5APt2期

机译：使用阳极多孔氧化铝在Au磁盘阵列上以有序方式进行高密度DNA构图
4. Patterned Magnetic Recording Media Using Anodic Porous Alumina with Ideally Ordered Hole Array Architecture [C] . K. Yasui, T. Morikawa, K. Nishio ECS Meeting . 2003

机译：使用阳极多孔氧化铝具有理想下订货孔阵列架构的图案磁记录介质
5. Multi-walled carbon nanotube growth produced by chemical vapor deposition into self-assembled hexagonally ordered nanoscale pore channels produced by aluminum anodizing and pulse-reverse electrodeposition. [D] . Sklar, Glenn Paul. 2005

机译：通过化学气相沉积到铝阳极氧化和脉冲反向电沉积产生的自组装六角形有序纳米级孔道中产生的多壁碳纳米管生长。
6. Multi-electrolyte-step anodic aluminum oxide method for the fabrication of self-organized nanochannel arrays [O] . Chun-Ko Chen, Sheng-Hui Chen 2012

机译：自组装纳米通道阵列的多电解质步阳极氧化铝法
7. High-speed focused-ion-beam patterning for guiding the growth of anodic alumina nanochannel arrays [O] . Liu N.W. 2010

机译：高速聚焦离子束构图，用于指导阳极氧化铝纳米通道阵列的生长

Ideally ordered 10 nm channel arrays grown by anodization of focused-ion-beam patterned aluminum

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