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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Silver coplanar waveguides as the passive components of choice for microwave integrated circuits
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Silver coplanar waveguides as the passive components of choice for microwave integrated circuits

机译：银共面波导是微波集成电路的首选无源组件

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摘要

High quality broadband passive components are needed for MMIC/MIC in silicon. Coplanar waveguides (CPW) provide an effective way to implement passives in microwave ICs. Silver "fat" wires in the back end interconnects, used for CPW fabrication, will reduce the bulk resistive loss in metallization to the lowest possible level, which is vital to minimize noise. Electromigration, electrochemical migration, and agglomeration issues are not a problem for silver microwave passive components, because of their coarse dimensions and the low current densities encountered in these structures. In this work Ag and Cu CPWs were designed, fabricated, and tested. Silver CPWs showed a 2-3 Ω/cm improvement in resistance over copper devices at 20 GHz.
机译：硅中的MMIC / MIC需要高质量的宽带无源组件。共面波导（CPW）提供了一种在微波IC中实现无源器件的有效方法。用于CPW制造的后端互连中的银“胖”线将金属化过程中的体电阻损耗降低到尽可能低的水平，这对于最小化噪声至关重要。对于银微波无源元件而言，电迁移，电化学迁移和团聚问题不是问题，因为它们的尺寸粗大且在这些结构中遇到的电流密度低。在这项工作中，银和铜的CPW被设计，制造和测试。银CPW在20 GHz时的电阻比铜器件提高了2-3Ω/ cm。

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