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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Effects of ambient gases on the direct growth of SiC nanowires by a simple heating method
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Effects of ambient gases on the direct growth of SiC nanowires by a simple heating method

机译:简单加热法对环境气体对SiC纳米线直接生长的影响

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摘要

A large quantity of highly uniform SiC nanowires was directly synthesized from Si substrates using a thermal heating method. The atomic structure, morphology, and composition of the SiC nanowires were strongly dependent on the ambient gases (Ar,N_2) used during nanowire growth. The nanowires grown in Ar were coated with amorphous carbon layers while the nanowires grown in N_2 had no coating layers. Also, nitrogen and oxygen were incorporated only into SiC nanowires grown in N_2. A proposed model for the role of ambient gases in the SiC nanowire growth is discussed.
机译:使用热加热方法直接从Si衬底合成了大量高度均匀的SiC纳米线。 SiC纳米线的原子结构,形态和组成在很大程度上取决于纳米线生长过程中使用的环境气体(Ar,N_2)。在Ar中生长的纳米线涂有非晶碳层,而在N_2中生长的纳米线则没有涂层。而且,氮和氧仅被掺入到在N_2中生长的SiC纳米线中。讨论了关于环境气体在SiC纳米线生长中的作用的拟议模型。

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