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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Determination of Mg composition in Mg_xZn_(1-x)O alloy: Validity of Vegard's law
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Determination of Mg composition in Mg_xZn_(1-x)O alloy: Validity of Vegard's law

机译：Mg_xZn_（1-x）O合金中Mg成分的测定：维加德定律的有效性

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摘要

Vegard's law and inductively coupled plasma atomic emission spectrometry were employed to determine the Mg composition in Mg_xZn_(1-x)O layers deposited on 6H-SiC substrates. With the increase of Mg composition in Mg_xZn_(1-x)O layers, the c-axis length decreased by 5.2048-0.072x, while the a-axis length increased to 3.2491+0.047x. The lattice constants estimated by Vegard's law and a theoretical model exhibited an uncertainty of ～3% that has been attributed to the ～2% lattice misfit in the MgO/ZnO materials system. Localized exciton peaks of Mg_xZn_(1-x)O alloy in photoluminescence (PL) measurements disappeared completely, while the neutral donor-acceptor pair and 1-longitudinal optical-phonon energies decreased rapidly with the increase of Mg composition. These PL data do not comply with Vegard's law. The asymmetric behavior in the Mg_xZn_(1-x)O alloy is the subject of locally disordered Mg potential fluctuations and an artifact of the c_(MgO) and a_(MgO) lengths calculated theoretically.
机译：采用Vegard定律和电感耦合等离子体原子发射光谱法确定沉积在6H-SiC衬底上的Mg_xZn_（1-x）O层中的Mg组成。随着Mg_xZn_（1-x）O层中Mg成分的增加，c轴长度减少了5.2048-0.072x，而a轴长度增加到3.2491 + 0.047x。根据Vegard定律和理论模型估算的晶格常数表现出约3％的不确定性，这是由于MgO / ZnO材料系统中约2％的晶格失配所致。 Mg_xZn_（1-x）O合金在光致发光（PL）测量中的局部激子峰完全消失，而中性供体-受体对和1纵向光学声子能量随Mg组成的增加而迅速降低。这些PL数据不符合Vegard法则。 Mg_xZn_（1-x）O合金的不对称行为是局部无序Mg电位波动以及理论上计算出的c_（MgO）和a_（MgO）长度的假象的问题。

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