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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Physical properties of nanostructures grown by oblique angle deposition
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Physical properties of nanostructures grown by oblique angle deposition

机译：斜角沉积生长的纳米结构的物理性质

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摘要

Isolated three-dimensional nanostructures were grown on templated or flat substrates by oblique angle deposition with or without substrate rotation where the physical shadowing effect dominates and controls the structures. The mechanical and electromechanical properties of Si springs and Co coated Si springs were measured by atomic force microscopy. The electrical property of β-phase W nanorods were measured by scanning tunneling microscopy. Examples of measurements of the elastic property of springs, electromechanical actuation, field emission of electrons, and field ionization of argon gas are presented. Potential applications and improvements of growth of uniform nanostructures are discussed.
机译：通过倾斜角沉积在有或没有基板旋转的情况下，在模板化或平坦的基板上生长隔离的三维纳米结构，其中物理阴影效应起主导作用并控制该结构。通过原子力显微镜法测量了Si弹簧和涂覆Co的Si弹簧的机械和机电性能。 β相W纳米棒的电学性能通过扫描隧道显微镜进行测量。给出了弹簧弹性性能，机电致动，电子场发射和氩气场电离的测量示例。讨论了均匀纳米结构的潜在应用和生长的改进。

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