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首页> 外文期刊>Journal of Vacuum Science & Technology >Etch-stop method for reliably fabricating sharp yet mechanically stable scanning tunneling microscope tips
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Etch-stop method for reliably fabricating sharp yet mechanically stable scanning tunneling microscope tips

机译:蚀刻停止方法,用于可靠地制造锋利而机械稳定的扫描隧道显微镜尖端

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摘要

An extension of the direct-current, double-lamella drop-off technique for electrochemically etching tungsten scanning tunneling microscope (STM) tips is presented. The key fabrication step introduced here is the use of an etch stop as a simple but accurate way to optimize the contact area between the etchant and the wire. By restricting the etching process, the final cone angle of the tips can be made sharp and mechanically stable without a lot of finesse from the STM tip maker.
机译:提出了一种扩展的直流双层脱落技术,用于电化学蚀刻钨扫描隧道显微镜(STM)尖端。此处介绍的关键制造步骤是使用蚀刻停止层,将其作为优化蚀刻剂和导线之间接触面积的简单而准确的方法。通过限制蚀刻过程,可以使尖端的最终锥角变得尖锐且机械稳定,而无需STM尖端制造商带来很多技巧。

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