Influence of precursor chemistry and growth temperature on the electrical properties of SrTiO_3-based metal-insulator-metal capacitors grown by atomic layer deposition

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• 来源
  《Journal of Vacuum Science & Technology》 |2011年第1期|p.01AC04.1-01AC04.5|共5页
• 作者

  H. Garcia; H. Castan; A. Gomez; S. Duenas; L. Bailon; K. Kukli; M. Kariniemi; M. Kemell; J. Niinisto; M. Ritala; M. Leskela;

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• 作者单位

  Departamento de Electricidad y Electrdnica, E.T.S.I. Telecomunicacion, University of Valladolid, 47011 Valladolid, Spain;

  Departamento de Electricidad y Electrdnica, E.T.S.I. Telecomunicacion, University of Valladolid, 47011 Valladolid, Spain;

  Departamento de Electricidad y Electrdnica, E.T.S.I. Telecomunicacion, University of Valladolid, 47011 Valladolid, Spain;

  Departamento de Electricidad y Electrdnica, E.T.S.I. Telecomunicacion, University of Valladolid, 47011 Valladolid, Spain;

  Departamento de Electricidad y Electrdnica, E.T.S.I. Telecomunicacion, University of Valladolid, 47011 Valladolid, Spain;

  Department of Chemistry, University of Helsinki, P.O. Box 55, FIN-00014 Helsinki, Finland;

  Department of Chemistry, University of Helsinki, P.O. Box 55, FIN-00014 Helsinki, Finland;

  Department of Chemistry, University of Helsinki, P.O. Box 55, FIN-00014 Helsinki, Finland;

  Department of Chemistry, University of Helsinki, P.O. Box 55, FIN-00014 Helsinki, Finland;

  Department of Chemistry, University of Helsinki, P.O. Box 55, FIN-00014 Helsinki, Finland;

  Department of Chemistry, University of Helsinki, P.O. Box 55, FIN-00014 Helsinki, Finland;

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• 正文语种 eng
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