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Growth mechanism of InGaN by plasma assisted molecular beam epitaxy

机译:等离子体辅助分子束外延生长InGaN的机理

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摘要

In this article, the authors discuss the mechanism of InGaN growth by plasma assisted molecular beam epitaxy. They present the evidence of the influence of substrate miscut on indium incorporation for the growths with different gallium fluxes. They propose and discuss the phenomenological model which describes the incorporation of indium into InGaN layers grown under the indium-rich conditions that takes into account following parameters: gallium and nitrogen fluxes, miscut angle, and the growth temperature.
机译:在本文中,作者讨论了等离子体辅助分子束外延生长InGaN的机理。他们提供了衬底错切对铟掺入的影响的证据,这些掺入对于不同镓流量的生长。他们提出并讨论了一种现象学模型,该模型描述了将铟掺入在富铟条件下生长的InGaN层中的过程,该模型考虑了以下参数:镓和氮通量,错切角和生长温度。

著录项

  • 来源
    《Journal of Vacuum Science & Technology》 |2011年第3期|p.03C136.1-03C136.5|共5页
  • 作者单位

    Institute of High Pressure Physics, Polish Academy of Sciences, 01-142 Warszawa, Poland;

    Institute of High Pressure Physics, Polish Academy of Sciences, 01-142 Warszawa, Poland and TopGaN Ltd., ul Sokolowska 29/37, 01-142 Warszawa, Poland;

    Institute of High Pressure Physics, Polish Academy of Sciences, 01-142 Warszawa, Poland and TopGaN Ltd., ul Sokolowska 29/37, 01-142 Warszawa, Poland;

    Institute of High Pressure Physics, Polish Academy of Sciences, 01-142 Warszawa, Poland;

    Institute of High Pressure Physics, Polish Academy of Sciences, 01-142 Warszawa, Poland;

    Institute of High Pressure Physics, Polish Academy of Sciences, 01-142 Warszawa, Poland;

    Institute of High Pressure Physics, Polish Academy of Sciences, 01-142 Warszawa, Poland and TopGaN Ltd., ul Sokolowska 29/37, 01-142 Warszawa, Poland;

    Institute of High Pressure Physics, Polish Academy of Sciences, 01-142 Warszawa, Poland;

    Institute for Microstructural Sciences, National Research Council, Ottawa K1A 0R6, Canada;

    Institute of High Pressure Physics, Polish Academy of Sciences, 01-142 Warszawa, Poland and TopGaN Ltd., ul Sokolowska 29/37, 01-142 Warszawa, Poland;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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