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首页> 外文期刊>Journal of Vacuum Science & Technology >Antimonide-based pN terahertz mixer diodes
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Antimonide-based pN terahertz mixer diodes

机译:基于锑的O太赫兹混频器二极管

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摘要

High frequency pN heterojunction diodes with cutoff frequencies over 1 THz have been fabricated using narrow bandgap high-mobility semiconductors. The pN heterojunction is composed of a 30 nm thick p-type In_(0.27)Ga_(0.73)Sb alloy and a 130 nm thick In_(0.69)Al_(0.31)As_(0.41)Sb_(0.59) n-layer. A high-mobility n-type InAs_(0.66)Sb_(0.34) contact layer is used to connect the mesa diode to a metal Ohmic contact. These alloys have a lattice constant a_0=6.2 A and are grown on semi-insulating GaAs, a_0=5.65 A, using a buffer consisting of 1 μm of In_(0.21)Ga_(0.l9)Al_(0.6)Sb with a_0=6.2 A and 0.5 μm of Ga_(0.35)Al_(0.65)Sb with a_0=6.12 A.
机译:使用窄带隙高迁移率半导体制造了截止频率超过1 THz的高频pN异质结二极管。 pN异质结由30纳米厚的p型In_(0.27)Ga_(0.73)Sb合金和130纳米厚的In_(0.69)Al_(0.31)As_(0.41)Sb_(0.59)n层组成。高迁移率n型InAs_(0.66)Sb_(0.34)接触层用于将台面二极管连接到金属欧姆接触。这些合金的晶格常数a_0 = 6.2 A,并在半绝缘GaAs a_0 = 5.65 A上生长,并使用1μmIn_(0.21)Ga_(0.19)Al_(0.6)Sb和a_0 = 6.2 A和0.5μm的Ga_(0.35)Al_(0.65)Sb和a_0 = 6.12 A.

著录项

  • 来源
    《Journal of Vacuum Science & Technology》 |2011年第3期|p.03C109.1-03C109.5|共5页
  • 作者单位

    Naval Research Laboratory, Washington, DC 20375;

    Naval Research Laboratory, Washington, DC 20375;

    Naval Research Laboratory, Washington, DC 20375;

    Naval Research Laboratory, Washington, DC 20375;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
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