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首页> 外文期刊>Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures >Flexible carbon nanotube-array cathodes: Fabrication and bending effect on field-electron emission
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Flexible carbon nanotube-array cathodes: Fabrication and bending effect on field-electron emission

机译：柔性碳纳米管阵列阴极：制备和弯曲对场电子发射的影响

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摘要

The authors report the fabrication of freestanding field-electron emitters based on arrays of vertically aligned carbon nanotubes (VACNTs) and flexible polydimethylsiloxane (PDMS). Transplant of VACNT arrays from silicon substrates to flexible PDMS platforms through a press-and-curing process resulted in PDMS-supported VACNT-array electron emitters. Test of field-electron emission from the PDMS-supported VACNT columns in a diode configuration showed good field-emission results regardless of cathode geometry, either planar or convex shape cathodes. Furthermore, the repeated bending of the PDMS-supported VACNT-column cathodes up to a few hundred times showed no noticeable degradation in field emission. Numerical simulations of electric field distribution at various bending angles and anode-cathode distance show that the general trend in emission-current variations is consistent with the difference in maximum electric field strength at the cathode surface.
机译：作者报告了基于垂直排列的碳纳米管（VACNT）和柔性聚二甲基硅氧烷（PDMS）阵列的独立式场电子发射器的制造。通过压制和固化工艺将VACNT阵列从硅基板移植到灵活的PDMS平台上，得到了PDMS支持的VACNT阵列电子发射器。在二极管配置中，由PDMS支持的VACNT色谱柱对场电子发射的测试显示出良好的场发射结果，而与阴极几何形状（平面或凸形阴极）无关。此外，PDMS支撑的VACNT柱阴极的反复弯曲多达数百次，显示出场发射没有明显下降。各种弯曲角度和阳极-阴极距离处的电场分布的数值模拟表明，发射电流变化的总体趋势与阴极表面最大电场强度的差异一致。

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