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Development of in situ analyzer of field-emission devices

机译：场发射器件原位分析仪的研制

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摘要

The authors are developing an in situ analyzer of field-emission devices that is based on the Seppen-Katamuki (SK) analysis, and they report preliminary results as proof of concept. One of the major differences in the present system from the conventional system is that field-emission characteristics are measured under modulation of emitter voltage. This enables to generate a SK plot, which requires the intercept and slope of the Fowler-Nordheim plot. Field-emission microscope images are acquired by a charge-coupled device camera. The field-emission characteristics of a tungsten-needle emitter were acquired and the SK plots were generated. They found that the fluctuation of field-emission current analyzed by the present system was expressed by motion along a linear line in the SK chart. The above result agrees with those obtained by previous studies.
机译：作者正在开发基于Seppen-Katamuki（SK）分析的现场发射设备的原位分析仪，他们报告了初步结果作为概念验证。本系统与常规系统的主要区别之一是在发射极电压的调制下测量场发射特性。这样就可以生成SK图，这需要Fowler-Nordheim图的截距和斜率。场发射显微镜图像是通过电荷耦合设备的摄像头获取的。获得了钨针发射器的场发射特性，并生成了SK图。他们发现，通过本系统分析的场发射电流的波动是通过沿SK图的直线运动来表示的。以上结果与以前的研究结果一致。

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  • 来源
    《Journal of Vacuum Science & Technology》 |2010年第2期|C2A77-C2A82|共6页
  • 作者

    Michito Kawasaki; Zhen He; Yasuhito Gotoh; Hiroshi Tsuji; Junzo Ishikawa;

  • 作者单位

    Department of Electronic Science and Engineering, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku,Kyoto 615-8510, Japan;

    Department of Electronic Science and Engineering, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku,Kyoto 615-8510, Japan;

    Department of Electronic Science and Engineering, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku,Kyoto 615-8510, Japan;

    Department of Electronic Science and Engineering, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku,Kyoto 615-8510, Japan;

    Department of Electronic Science and Engineering, Kyoto University, Kyotodaigaku-Katsura, Nishikyo-ku,Kyoto 615-8510, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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