High performance of compact radical monitoring probe in H_2/N_2 mixture plasma

著录项

• 来源
  《Journal of Vacuum Science & Technology》 |2010年第2期|L17-L20|共4页
• 作者

  Chang Sung Moon; Keigo Takeda; Seigo Takashima; Makoto Sekine; Yuichi Setsuhara; Masaharu Shiratani; Masaru Hori;

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• 作者单位

  Department of Electrical Engineering and Computer Science, Graduate School of Engineering,Nagoya University, Nagoya 463-8603, Japan;

  Department of Electrical Engineering and Computer Science, Graduate School of Engineering,Nagoya University, Nagoya 463-8603, Japan;

  Plasma Center for Industrial Applications, Nagoya Urban Industries Promotion Corporation,Nagoya 463-0003, Japan;

  Department of Electrical Engineering and Computer Science, Graduate School of Engineering,Nagoya University, Nagoya 463-8603, Japan Core Research for Evolutional Science and Technology,Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan;

  Joining and Welding Research Institute, Osaka University, Ibaraki, Osaka 567-0047, Japan Core Research for Evolutional Science and Technology, Japan Science and Technology Agency,Kawaguchi, Saitama 332-0012, Japan;

  Department of Electronics, Graduate School of Information Science and Electrical Engineering,Kyushu University, Fukuoka 812-8581, Japan Core Research for Evolutional Science and Technology,Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan;

  Department of Electrical Engineering and Computer Science, Graduate School of Engineering,Nagoya University, Nagoya 463-8603, Japan Core Research for Evolutional Science and Technology,Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan;

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• 原文格式 PDF
• 正文语种 eng
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