...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Vacuum Science & Technology >Inspection of open defects in a thin film transistor-liquid crystal display panel by using a low-energy electron microcolumn
【24h】

Inspection of open defects in a thin film transistor-liquid crystal display panel by using a low-energy electron microcolumn

机译：使用低能电子微柱检查薄膜晶体管液晶显示面板中的开路缺陷

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The demand on the electron beam (e-beam) for the inspection of semiconductor devices or display panel is rapidly increasing since e-beam cannot only monitor the small structures but also has the potential of detecting electrical troubles or repairing the defects. However, the merit of e-beam is limited because of the high cost, low throughput, and the possible damage due to the high e-beam energy. A microcolumn is a strong candidate to solve these limitations as its size is extremely miniaturized (both column diameter and height can be reduced down to a few millimeters) and the output e-beam energy is as low as 100-1000 eV. In this work, the authors tried to test the inspection of defects by applying a low voltage microcolumn to liquid crystal display panel. In order to demonstrate the authors' inspection method, they extracted a 7" thin film transistor-liquid crystal display (TFT-LCD) panel from the production line just after completing the pixel structures and used this panel as a test sample. On the selected panel, the authors intentionally made some defects such as open data or gate lines by cutting some points using a laser beam. They operated their microcolumn with a beam energy of 300 eV and obtained the scanning images of the panel while operating the panel with specific operation conditions. The operation parameters for the test TFT-LCD panel such as the voltages applied to the gate lines, data lines, and storage capacitors was fixed at two specific sets of values. Then, the image obtained by the secondary electron reflects the information on the electrical state of the pixels as well as the geometrical ones. By combining the two sets of data, the authors could explain the correlation between the irregular behavior in the image contrast and the open defects and the detailed results will be discussed.
机译：由于电子束不仅可以监视小型结构，而且具有检测电气故障或修复缺陷的潜力，因此用于检查半导体器件或显示面板的电子束（电子束）的需求正在迅速增加。然而，由于高成本，低吞吐量以及由于高电子束能量而可能造成的损坏，因此电子束的优点受到限制。微柱是解决这些局限性的强大候选者，因为它的尺寸极其小巧（色谱柱的直径和高度都可以减小到几毫米），并且输出电子束能量低至100-1000 eV。在这项工作中，作者试图通过将低压微柱应用于液晶显示面板来测试缺陷检查。为了演示作者的检查方法，他们在完成像素结构后立即从生产线中提取了一块7英寸的薄膜晶体管液晶显示器（TFT-LCD）面板，并将其用作测试样本。作者故意用激光束切割一些点来制造一些缺陷，例如开放数据或选通线，他们以300 eV的束能量操作其微柱，并在进行特定操作的同时获得面板的扫描图像。将测试TFT-LCD面板的操作参数（例如施加到栅极线，数据线和存储电容器的电压）固定为两组特定的值，然后，由二次电子获得的图像将信息反射到通过结合两组数据，作者可以解释图像中不规则行为之间的相关性。将讨论ntrast和开放缺陷以及详细结果。

著录项

  • 来源
    《Journal of Vacuum Science & Technology》 |2010年第6期|p.C6C69-C6C73|共5页
  • 作者

    Tae Sik Oh; Dae-Wook Kim; Young Chul Kim; Seungjoon Ahn; Gun-hee Lee; Ho Seob Kim;

  • 作者单位

    Department of Information Display, College of Engineering, CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan, Chungnam 336-708, Korea;

    Department of Information Display, College of Engineering, CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan, Chungnam 336-708, Korea;

    Department of Optometry, Eulji University, Seongnam-si, Gyeonggi-do 461-713, Korea;

    Department of Information Display, College of Engineering, CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan, Chungnam 336-708, Korea;

    Inspection Engineering Office, LG Display Co., Ltd., 163 Simi-dong, Gumi-si, Gyeongsangbuk-do 730-731, Korea;

    Department of Information Display, College of Engineering, CNST, Sun Moon University, 100 Kalsan-ri, Tangjeong-myun, Asan, Chungnam 336-708, Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号