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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Fabrication and tuning of nanoscale metallic ring and split-ring arrays
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Fabrication and tuning of nanoscale metallic ring and split-ring arrays

机译：纳米级金属环和开口环阵列的制作和调试

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摘要

Metallic structures with dimensions smaller than the wavelength of light demonstrate optical properties which depend strongly on the nanoparticle size, shape, and interparticle spacing. The optical properties are caused by the excitation of localized surface plasmon resonances that lead to strong enhancement and confinement of the optical field and can be exploited for many applications including surface-enhanced Raman spectroscopy, near-field scanning optical microscopy, and negative refractive index materials. In order to fully exploit the properties of these structures, both a highly reproducible and flexible fabrication technique and an in-depth understanding of the optical properties are needed. In this article, the authors demonstrate the fabrication of arrays of gold rings and split rings on glass using electron beam lithography. Electron beam lithography allows not only precise control of the size, shape, and spacing of the arrays but also the scope to design novel shapes at will. We characterize these arrays using polarization dependent spectroscopy. The structures can support multiple plasmon resonances, demonstrating that excellent uniformity across the array is achieved. These resonances are further characterized using a finite difference time domain method to model the electric field distribution around the ring structures.
机译：尺寸小于光波长的金属结构表现出的光学性能在很大程度上取决于纳米颗粒的尺寸，形状和颗粒间的间距。光学特性是由局部表面等离振子共振的激发导致的，从而导致光学场的强烈增强和局限，可以用于许多应用，包括表面增强拉曼光谱，近场扫描光学显微镜和负折射率材料。为了充分利用这些结构的特性，既需要高度可复制且灵活的制造技术，也需要对光学特性的深入了解。在本文中，作者演示了使用电子束光刻技术在玻璃上制造金环和裂环阵列的方法。电子束光刻技术不仅可以精确控制阵列的大小，形状和间距，还可以随意设计新颖的形状。我们使用偏振相关光谱来表征这些阵列。该结构可以支持多个等离激元共振，表明在整个阵列上实现了出色的均匀性。这些共振的特征是使用时域有限差分法来模拟环形结构周围的电场分布。

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