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A Novel Piezoelectric Micro-motor using Multilayer Co-firing Piezoelectric Ceramics

机译：多层共烧压电陶瓷的新型压电微电机

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摘要

A novel rotary piezoelectric micro-motor (φ8mm × 10mm) is proposed in this paper. Different from the conventional traveling wave ultrasonic motor using piezoelectric ceramic ring, four multilayer co-firing piezoelectric ceramic bulks (2mm × 2mm × 3mm) are used to generate vibration in the ring type stator. The layout and electric signals applied to the piezoelectric ceramic bulks are designed for the purpose of generating elliptical trajectories on the surface of the stator. The working mode of the prototype motor is simulated by the finite element method, and also measured by the Doppler Laser Vibrometer. The experimental results are in good agreement with simulation, which verifies the effectiveness of the finite element model. The prototype motor is driven at the low voltage of 12V under the frequency of 64.91 KHz.
机译：提出了一种新型的旋转压电微电机（φ8mm×10mm）。与使用压电陶瓷环的常规行波超声波电动机不同，使用四个多层共烧压电陶瓷块（2mm×2mm×3mm）在环形定子中产生振动。设计用于压电陶瓷块的布局和电信号，目的是在定子表面上生成椭圆形轨迹。原型电动机的工作模式通过有限元方法进行模拟，并通过多普勒激光振动计进行测量。实验结果与仿真结果吻合良好，验证了有限元模型的有效性。原型电动机在频率为64.91 KHz的12V低压下驱动。

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