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Image-based magnification calibration for electron microscope

机译：基于图像的电子显微镜放大倍率校准

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Magnification calibration is a crucial task for the electron microscope to achieve accurate measurement of the target object. In general, magnification calibration is performed to obtain the correspondence between the scale of the electron microscope image and the actual size of the target object using the standard calibration samples. However, the current magnification calibration method mentioned above may include a maximum of 5 % scale error, since an alternative method has not yet been proposed. Addressing this problem, this paper proposes an image-based magnification calibration method for the electron microscope. The proposed method employs a multi-stage scale estimation approach using phase-based correspondence matching. Consider a sequence of microscope images of the same target object, where the image magnification is gradually increased so that the final image has a very large scale factor S (e.g., S - 1,000) with respect to the initial image. The problem considered in this paper is to estimate the overall scale factor S of the given image sequence. The proposed scale estimation method provides a new methodology for high-accuracy magnification calibration of the electron microscope. This paper also proposes a quantitative performance evaluation method of scale estimation algorithms using Mandelbrot images which are precisely scale-controlled images. Experimental evaluation using Mandelbrot images shows that the proposed scale estimation algorithm can estimate the overall scale factor S - 1,000 with approximately 0.1 % scale error. Also, a set of experiments using image sequences taken by an actual scanning transmission electron microscope (STEM) demonstrates that the proposed method is more effective for magnification calibration of a STEM compared with a conventional method.
机译：放大倍数校准是电子显微镜实现目标物体精确测量的关键任务。通常，使用标准校准样品执行放大率校准以获得电子显微镜图像的尺寸与目标对象的实际尺寸之间的对应关系。然而，由于尚未提出替代方法，因此上述当前的放大倍率校准方法可包括最大5％的比例误差。针对这一问题，本文提出了一种基于图像的电子显微镜倍率校正方法。所提出的方法采用了基于阶段的对应匹配的多阶段规模估计方法。考虑相同目标物体的一系列显微镜图像，其中图像放大率逐渐增加，使得最终图像相对于初始图像具有非常大的比例因子S（例如，S-1,000）。本文考虑的问题是估计给定图像序列的整体比例因子S。提出的尺度估计方法为电子显微镜的高精度放大倍率校准提供了一种新的方法。本文还提出了一种使用精确控制比例的Mandelbrot图像对比例估计算法进行定量性能评估的方法。使用Mandelbrot图像进行的实验评估表明，所提出的比例估计算法可以估计总体比例因子S-1,000，并且比例误差约为0.1％。此外，使用实际扫描透射电子显微镜（STEM）拍摄的图像序列进行的一组实验表明，与传统方法相比，该方法对于STEM的放大倍率校准更为有效。

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