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首页> 外文期刊>Materials Chemistry and Physics >Effect of pyrolysis temperature on the properties of Bi3.5La0.5Ti3O12 thin films deposited by aqueous chemical solution deposition
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Effect of pyrolysis temperature on the properties of Bi3.5La0.5Ti3O12 thin films deposited by aqueous chemical solution deposition

机译：热解温度对水溶液化学沉积Bi3.5La0.5Ti3O12薄膜性能的影响

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摘要

Bi3.5La0.5Ti3O12 thin films for ferroelectric random access memory application were fabricated by the aqueous chemical solution deposition method. The precursor films were deposited by spin coating and subsequently transformed into the oxide by thermal treatment on three hot plates and crystallizing in a rapid thermal processing furnace at a temperature as low as 650° C. The temperature of the third hot plate step was varied, which affected the ferroelectric properties of the prepared films. The ferroelectric properties of the crystallized films as well as their crystallographic structure, texture and microstructure were characterized using various experimental techniques. The evolution of the precursor chemical structure of the thin films, containing organic compounds, was studied at different temperatures during the thermal treatment. In order to maximize the remanent polarization of the crystalline Bi3.5La0.5Ti3O12 thin films to approximately 6 μ C cm(-2) it is preferable to remove all the organic components of the thin-film precursor prior to the intermediate crystallization step in the rapid thermal processing furnace. A temperature of 370° C has been shown to be the minimal temperature for achieving the complete decomposition of the organic constituents of the precursor thin film. © 2005 Elsevier B.V. All rights reserved.
机译：采用水溶液化学沉积法制备了用于铁电随机存取存储器的Bi3.5La0.5Ti3O12薄膜。通过旋涂沉积前体膜，随后通过在三个加热板上的热处理将其转化为氧化物，并在快速热处理炉中在低至650°D的温度下结晶。改变第三热板步骤的温度，这影响了所制备膜的铁电性能。使用各种实验技术表征了结晶膜的铁电性能以及其晶体学结构，织构和微观结构。在热处理过程中，在不同温度下研究了包含有机化合物的薄膜前体化学结构的演变。为了使结晶Bi3.5La0.5Ti3O12薄膜的剩余极化最大程度达到约6μC cm（-2），最好在中间结晶步骤之前除去薄膜前体的所有有机成分。快速热处理炉。温度为370度；已经表明，C是实现前体薄膜的有机成分完全分解的最低温度。 ＆复制; 2005 Elsevier B.V.保留所有权利。

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