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Microstructure and mechanical properties of VN/SiO_2 nanomultilayers synthesized by reactive sputtering

机译:反应溅射法合成VN / SiO_2纳米多层膜的微观结构和力学性能

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摘要

VN/SiO_2 nanomultilayers with various individual SiO_2 and VN layer thickness were prepared by reactive sputtering process. The crystallization condition of the SiO_2 layers and how they influence the characteristics of the multilayers were studied. The r
机译:通过反应溅射工艺制备了具有各种单独的SiO_2和VN层厚度的VN / SiO_2纳米多层。研究了SiO_2层的结晶条件及其对多层膜性能的影响。 r

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