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首页> 外文期刊>Materials Science and Engineering >Measuring notch toughness of thin film metallic glasses using focused ion beam-based microcantilever method: Comparison with Ti and TiN crystalline films
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Measuring notch toughness of thin film metallic glasses using focused ion beam-based microcantilever method: Comparison with Ti and TiN crystalline films

机译：使用聚焦离子束微悬臂梁法测量薄膜金属玻璃的缺口韧性：与Ti和TiN结晶膜的比较

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摘要

This study measured the notch toughness of Zr- and W-based thin film metallic glasses (TFMGs), and compared the results with those data obtained from crystalline Ti and TiN thin films as well as bulk metallic glass (BMG). Deflection testing was conducted using microcantilevers fabricated by focused ion beam machining. The resulting load vs. deflection curves revealed that Zr-based TFMG, BMG, and Ti films exhibited non-linear curves after yielding, which represented the ductile deformation characteristics. Higher notch toughness values of 3.84 and 5.13 MPa√m for Zr- and W-based TFMGs, respectively, than TiN (2.15 MPa√m) and Ti (0.74 MPa√m) films were obtained. Thus, at micro-scales, metallic glasses present relatively better fracture behavior than do crystalline materials. This paper presents a direct comparison of works related to the notch toughness of amorphous and crystalline materials.
机译：这项研究测量了Zr和W基薄膜金属玻璃（TFMG）的缺口韧性，并将结果与​​从结晶Ti和TiN薄膜以及大块金属玻璃（BMG）获得的数据进行了比较。使用通过聚焦离子束加工制造的微悬臂梁进行挠曲测试。所得的载荷-挠度曲线表明，Zr基TFMG，BMG和Ti薄膜在屈服后呈现非线性曲线，这代表了韧性变形特性。 Zr基和W基TFMG的缺口韧性值分别比TiN（2.15MPa√m）和Ti（0.74MPa√m）薄膜高，分别为3.84和5.13MPa√m。因此，在微观尺度上，金属玻璃的断裂行为要比结晶材料好。本文对与非晶和结晶材料的缺口韧性相关的工作进行了直接比较。

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  • 来源
    《Materials Science and Engineering》 |2017年第20期|104-109|共6页
  • 作者

    Chia-Lin Li; Jinn P. Chu; Jyh-Wei Lee;

  • 作者单位

    Graduate Institute of Applied Science and Technology, National Taiwan University of Science and Technology, Taipei 10607, Taiwan;

    Department of Materials Science and Engineering, National Taiwan University of Science and Technology, Taipei 10607, Taiwan;

    Department of Materials Science and Engineering, National Taiwan University of Science and Technology, Taipei 10607, Taiwan,Center for Thin Films Technologies and Applications, Ming Chi University of Technology, New Taipei City 24301, Taiwan;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Metallic glass; Thin film; Notch toughness; Microcantilever;

    机译：金属玻璃;薄膜;缺口韧性;微悬臂梁;

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