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Mechanical behavior of Cu/TiN multilayers at ambient and elevated temperatures: Stress-assisted diffusion of Cu

机译:Cu / TiN多层膜在室温和高温下的力学行为:应力辅助下的Cu扩散

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摘要

The deformation and failure mechanism of a multilayered thin film consisting of alternating soft Cu and hard TiN interlayers has been studied by in situ SEM compression of micro-pillars and finite element simulations. While the yielding of the multilayer is governed by the 'size-dependent' strength of Cu, the failure was found to occur by shearing of the columnar grains of TiN. At elevated temperatures of 200 and 400 ℃, the yielding of the multilayers is governed by the stress-assisted diffusion of the Cu interlayers, which coalesce into microcrystals and grow into larger faceted crystals.
机译:通过微柱的原位SEM压缩和有限元模拟研究了由交替的软Cu和硬TiN中间层组成的多层薄膜的变形和破坏机理。尽管多层的屈服由铜的“尺寸依赖性”强度决定,但发现断裂是通过剪切TiN的柱状晶粒而发生的。在200和400℃的高温下,多层膜的屈服取决于铜中间层的应力辅助扩散,中间层聚结成微晶并成长为较大的刻面晶体。

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  • 来源
    《Materials Science and Engineering》 |2015年第3期|375-382|共8页
  • 作者单位

    Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland ,Structure and Nano-/Micromechanics of Materials, Max-Planck-Institute fuer Eisenforschung GmbH, Max-Planck-Strasse 1, 40237 Duesseldorf, Germany;

    Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland;

    Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland;

    Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland;

    AIN, Centre of Advanced Surface Engineering, Carretera Pamplona, N° 1, E-31191 Cordovilla-Pamplona, Spain;

    AIN, Centre of Advanced Surface Engineering, Carretera Pamplona, N° 1, E-31191 Cordovilla-Pamplona, Spain;

    Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Micromechanics; Nanostructured materials; Electron microscopy; Failure; Plasticity; Interfaces;

    机译:微力学;纳米结构材料;电子显微镜;失败;可塑性;介面;

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