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Low-temperature Cu-to-Cu bonding using silver nanoparticles stabilised by saturated dodecanoic acid

机译:使用饱和十二烷酸稳定的银纳米颗粒进行低温铜对铜键合

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摘要

We developed a new method to prepare silver NP paste that can be used as a Cu-to-Cu bonding material under an additional pressure of 10 MPa. This new paste consists of a high concentration of uniform silver NPs with a thin layer of dodecanoate coated on the surface. Shear strengths indicate that the silver NP paste prepared with our method could serve as a bonding material in electronic packaging and interconnections. The microstructure of the interface between the silver and the copper substrate was examined using scanning electron microscopy (SEM) and high-resolution transmission electron microscopy (HRTEM). Based on this analysis, a metallic bond is formed at the interface between the sintered Ag layer and both sides of the joint when bonding Cu pads above 250 ℃.
机译:我们开发了一种新的制备NP银银浆的方法,该银浆可在10 MPa的附加压力下用作Cu-Cu-Cu键合材料。这种新的糊剂由高浓度的均匀银NP组成,表面上涂有一层十二烷酸酯薄层。剪切强度表明,用我们的方法制备的NP银银浆可以用作电子封装和互连中的粘结材料。使用扫描电子显微镜(SEM)和高分辨率透射电子显微镜(HRTEM)检查银和铜基板之间界面的微观结构。基于此分析,在250℃以上焊接Cu焊盘时,在烧结的Ag层与接头两侧之间的界面处会形成金属键。

著录项

  • 来源
    《Materials Science and Engineering》 |2014年第8期|372-378|共7页
  • 作者单位

    Department of Chemistry, Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan;

    Department of Chemistry, Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan;

    Department of Chemistry, Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan;

    Department of Chemistry, Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan;

    Graduate Institute of Applied Science and Technology, National Taiwan University of Science and Technology, Taipei, Taiwan;

    Department of Materials Science and Engineering, National Chung Hsing University, Taichung, Taiwan;

    Department of Materials Science and Engineering, National Chung Hsing University, Taichung, Taiwan;

    Advanced Semiconductor Engineering Group, No. 26, Chin 3rd Road, Nantze Export Processing Zone, Kaohsiung, Taiwan;

    Advanced Semiconductor Engineering Group, No. 26, Chin 3rd Road, Nantze Export Processing Zone, Kaohsiung, Taiwan;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Bonding material; Copper-to-copper bonding; Silver; Nanoparticles; Interconnection;

    机译:粘接材料;铜铜键合;银;纳米颗粒;互连;

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