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High temperature mechanical properties and microstructure of hard TaSiN coatings

机译：硬滴鼻菌涂层的高温力学性能和微观结构

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摘要

Room and high temperature mechanical properties of reactive magnetron sputtered TaSiN coatings were measured using nanoindentation (between 25 °C and 500 °C). Fracture toughness was also evaluated at a similar temperature range using the micropillar splitting method. The influence of the nitrogen concentration on the evolving phases and microstructure of the TaSiN coatings, before and after the high temperature testing, were examined by X-ray diffraction (XRD) and transmission electron microscopy (TEM) analysis. XRD spectra showed broad peaks with hexagonal γ-Ta_2N as the main phase, with the cubic 5-TaN phase emerging for higher N contents. Phase composition remained unchanged before and after the 500 °C tests. However, after the high temperature tests, TEM analysis showed the presence of an oxide surface layer, with a thickness that decreased (from 42 to 15 nm) with N content, due to residual oxygen diffusion, which replaces nitrogen to form amorphous SiO_x. Beneath the oxide-rich surface layer, coatings exhibited a stable nanocrystalline columnar microstructure. Hardness and fracture toughness increased with N content, initially due to the formation of an amorphous Si-N tissue at grain boundaries, and for even higher N contents, due to the appearance of the hard cubic 8-TaN phase. Hardness at 500 °C decreased only by 15%, while fracture toughness followed the opposite trend, due to increased plasticity with temperature. The optimum composition turned out to be Ta_(55)Si_(10)N_(35), which retained a hardness of 30 GPa at 500 °C, being also the toughest. These observations make this system very interesting for high temperature applications.
机译：使用纳米凸缘（25℃至500℃）测量反应性磁控溅射Tasin涂层的房间和高温力学性能。还使用微米分裂法在类似的温度范围内评估断裂韧性。通过X射线衍射（XRD）和透射电子显微镜（TEM）分析，检查氮浓度对高温测试之前和之后的Tasin涂层的演化阶段和微观结构的影响。 XRD光谱显示较大峰值六角形γ-TA_2N作为主阶段，立方5-TAN相出现为较高的N个内容物。在500℃测试之前和之后，相组合物保持不变。然而，在高温测试之后，TEM分析显示出氧化物表面层的存在，厚度为厚度（从42-15nm），由于残留的氧扩散，其取代氮以形成无定形SiO_x。在富含氧化物的表面层下方，涂层表现出稳定的纳米晶柱状微观结构。由于硬度立方8-TAN相的外观，硬度和断裂韧性随着N含量的形成，最初是由于形成晶界的无定形Si-n组织，并且甚至更高的N含量。 500℃的硬度仅减少15％，而断裂韧性随着温度的可塑性增加而呈现相反的趋势。最佳组合物原来是Ta_（55）Si_（10）N_（35），其在500℃下保留30GPa的硬度，也是最艰难的。这些观察结果使该系统对高温应用非常有趣。

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  • 来源
    《Materials Science and Engineering》 |2020年第21期|139976.1-139976.10|共10页
  • 作者

    M.A. Monclus; L. Yang; I. Lopez-Cabanas; M. Castillo-Rodriguez; A. Zaman; J. Wang; E.I. Meletis; R. Gonzalez-Arrabal; J. Llorca; J.M. Molina-Aldareguia;

  • 作者单位

    IMDEA Materials Institute c/Eric Kandel 2 28906 Getafe Madrid Spain;

    China Aerodynamics Research and Development Center Mianyang 621000 China;

    IMDEA Materials Institute c/Eric Kandel 2 28906 Getafe Madrid Spain Department of Materials Science and Engineering University of Texas at Arlington TX 76019 USA;

    IMDEA Materials Institute c/Eric Kandel 2 28906 Getafe Madrid Spain;

    Department of Materials Science and Engineering University of Texas at Arlington TX 76019 USA;

    China Aerodynamics Research and Development Center Mianyang 621000 China;

    Department of Materials Science and Engineering University of Texas at Arlington TX 76019 USA;

    Instituto de Fusion Nuclear Guillermo Velarde (UPM) and Departamento de lngenieria Energetica (ETSII/UPM) Jose Gutierrez Abascal 2 28006 Madrid Spain;

    IMDEA Materials Institute c/Eric Kandel 2 28906 Getafe Madrid Spain Department of Materials Science Polytechnic University of Madrid E. T.S. de Ingenieros de Caminos 28040 Madrid Spain;

    IMDEA Materials Institute c/Eric Kandel 2 28906 Getafe Madrid Spain;

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  • 正文语种 eng
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  • 关键词

    Coatings; Tantalum silicon nitride; Magnetron sputtering; High temperature hardness; Toughness;

    机译：涂料;钽氮化硅;磁控溅射;高温硬度;韧性;

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