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Hazardous industrial gases identified using a novel polymer/MWNT composite resistance sensor array

机译:使用新型聚合物/ MWNT复合电阻传感器阵列识别的有害工业气体

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Hazardous industrial chemical gases pose a significant threat to the environment and human life. Therefore, there is an urgent need to develop a reliable sensor for identifying these hazardous gases. In this work, a silicon wafer microelectrode substrate for a resistance sensor was fabricated using the semiconductor manufacturing process. Conductive carbon nanotubes were then mixed with six different polymers with different chemical adsorption properties to produce a composite thin film for the fabrication of a chemical sensor array. This array was then utilized to identify three hazardous gases at different temperatures. Experimental results for six polymers for chemical gases, such as tetrahydrofuran (THF), chloroform (CHCl_3) and methanol (MeOH) at different temperatures, indicate that the variation in sensitivity resistance increased when the sensing te'mperature increased. The poly(ethylene adipate)/MWNT sensing film had high sensitivity, excellent selectivity, and good reproducibility in detecting all chemical agent vapors. Additionally, this study utilized a bar chart and statistical methods in principal component analysis to identify gases with the polymer/MWNT sensor.
机译:有害的工业化学气体对环境和人类生命构成重大威胁。因此,迫切需要开发一种可靠的传感器来识别这些有害气体。在这项工作中,使用半导体制造工艺制造了用于电阻传感器的硅晶片微电极基板。然后将导电碳纳米管与六种具有不同化学吸附特性的不同聚合物混合,以生产用于制造化学传感器阵列的复合薄膜。然后,该阵列用于识别不同温度下的三种有害气体。对六种化学气体聚合物(例如四氢呋喃(THF),氯仿(CHCl_3)和甲醇(MeOH))在不同温度下的实验结果表明,当感测温度升高时,灵敏度电阻的变化会增加。聚己二酸乙二醇酯/ MWNT传感膜具有高灵敏度,优异的选择性和良好的重现性,可检测所有化学试剂蒸气。此外,这项研究在主成分分析中使用了条形图和统计方法,以利用聚合物/ MWNT传感器识别气体。

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