Self-organized nanostructures in silicon and glass for MEMS, MOEMS and BioMEMS

著录项

• 来源
  《Materials Science and Engineering》 |2010年第3期|p.78-84|共7页
• 作者

  K. Lilienthal; M. Fischer; M. Stubenrauch; A. Schober;

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• 作者单位

  Research Croup 'Micro fluidics and Biosensors', Ilmenau University of Technology, Institute of Micro- and Nanotechnologies, D-98693 Ilmenau, Germany;

  Research Croup 'Micro fluidics and Biosensors', Ilmenau University of Technology, Institute of Micro- and Nanotechnologies, D-98693 Ilmenau, Germany;

  rnDepartment of Micromechanical Systems, Ilmenau University of Technology, Institute of Micro- and Nanotechnologies, D-98693 Ilmenau, Germany;

  rnResearch Croup 'Micro fluidics and Biosensors', Ilmenau University of Technology, Institute of Micro- and Nanotechnologies, D-98693 Ilmenau, Germany;

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• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  nanostructured surfaces; black silicon; glass; silicon on ceramics; etching; plasma processing;

  机译：纳米结构表面;黑硅玻璃;陶瓷上的硅蚀刻等离子处理;