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首页> 外文期刊>Materials Science and Engineering. B, Solid-State Materials for Advanced Technology >Effect of the substrate temperature on the properties of ZnO films grown by RF magnetron sputtering
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Effect of the substrate temperature on the properties of ZnO films grown by RF magnetron sputtering

机译：衬底温度对射频磁控溅射ZnO薄膜性能的影响

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摘要

Zinc Oxide films were deposited by RF magnetron sputtering using a zinc oxide target with different substrate temperatures. The structural characteristics of the films were investigated by X ray diffractometry (XRD) and scanning electron Microscopy (SEM), while the electric and optical properties of the films were studied by the impedance spectroscopy and optical spectroscopy, respectively. It was shown that all of the films deposited have a c-axis preferred orientation perpendicular to the substrate. As the temperature of the substrate increased, the crystallinity was enhanced and the grain size was increased. Furthermore, the electrical resistivity was decreased. However, the optical transrnittance of about 80 percent was maintained over the substrate temperature range. The electrical ac impedance spectroscopy data showed distinct arcs from lowest (Hz) frequency to highest (MHz) frequency due to the contribution of the grain and grain boundaries to the mechanism of the charge transfer in the material. The conduction is dominated by the grain boundary effect at low substrate temperatures while at high temperatures, the contribution of the grains is predominant. This paper describes the utility of these techniques, their theory and use for controlling the material properties, the issues that we are addressing to develop a gas sensor prototype knowing the best operating frequency of the sensor and the optimum crystalline structure.
机译：使用具有不同衬底温度的氧化锌靶，通过RF磁控溅射沉积氧化锌膜。通过X射线衍射法（XRD）和扫描电子显微镜（SEM）研究了膜的结构特征，同时通过阻抗光谱和光学光谱法研究了膜的电学和光学性质。结果表明，所有沉积的薄膜都具有垂直于基材的c轴方向。随着基底温度的升高，结晶度增强并且晶粒尺寸增大。此外，电阻率降低。但是，在基板温度范围内保持了约80％的透光率。交流阻抗谱数据显示，从最低（Hz）频率到最高（MHz）频率，存在明显的电弧，这是由于晶粒和晶界对材料中电荷转移机制的影响所致。在较低的衬底温度下，导电主要受晶界效应的影响，而在高温下，晶粒的贡献占主导地位。本文介绍了这些技术的实用性，它们在控制材料特性方面的理论和用途，在开发已知气体传感器最佳工作频率和最佳晶体结构的气体传感器原型时要解决的问题。

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