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Novel optical elements made from porous Si

机译:由多孔硅制成的新型光学元件

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It is shown that porous silicon in various geometries and morphologies can be used for novel optical elements by combining theoretical insights with suitable porous structures and some pre- and post-processing of the silicon. The paper restricts itself to light propagation in the pore direction, using a theory utilizing specific variants of waveguide modes matched to the element investigated. A short introduction into the theoretical and pore etching background is followed by detailed theoretical and experimental results to the following novel optical elements: environmentally stable optical components from mesoporous silicon, long-wave pass filters, macroporous silicon UV filters, polarization components for the UV range, retroreflection suppression plate, omnidirectional IR and visible wavelengths filters. Either new components are presented, mostly with first experimental results, or the state-of-the-art for previously discussed elements is considerably improved upon. An integral part of the paper is the use of various kinds of pore wall coatings or special pore geometries, which are needed to meet demanding requirements.
机译:通过将理论见解与合适的多孔结构以及硅的一些预处理和后处理相结合,可以证明具有各种几何形状和形态的多孔硅可以用于新型光学元件。论文利用一种理论,利用与所研究元素匹配的波导模式的特定变体,将自身局限于光在孔隙方向上的传播。对理论和孔刻蚀背景进行了简短介绍,随后是对以下新型光学元件的详细理论和实验结果:中孔硅对环境稳定的光学组件,长波通滤光片,大孔硅UV滤光片,UV范围的偏振分量,回射抑制板,全向红外和可见波长滤光片。要么提供新的组件,主要是首先获得实验结果,要么可以大大改善先前讨论的元素的最新技术。纸的组成部分是使用各种孔壁涂料或特殊的孔几何形状,以满足要求。

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