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Diffractive optical elements with porous silicon layers

机译:具有多孔硅层的衍射光学元件

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摘要

We investigate the basic chromatic properties of dispersive surface relief diffractive optical elements with porous silicon (PSi) layers. Rigorous and scalar wavelength-dependent diffraction efficiencies are juxtaposed and compared to reflection coefficients of uniform silicon and PSi layers. The application of the device as an enhanced sensor is discussed. A spectral covariance criterion for efficient evaluation of the spectral changes induced by analyte filling the pores is presented. Experimental results for the device reveal an increased spectral selectivity of the diffractively structured PSi layers compared to uniform PSi layers.
机译:我们研究具有多孔硅(PSi)层的色散表面起伏衍射光学元件的基本色性质。严格的和标量的与波长有关的衍射效率并置,并与均匀的硅层和PSi层的反射系数进行比较。讨论了该设备作为增强型传感器的应用。提出了光谱协方差标准,用于有效评估由填充孔的分析物引起的光谱变化。该器件的实验结果表明,与均匀的PSi层相比,衍射结构化的PSi层具有更高的光谱选择性。

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