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The Effects of Structure Defects on the Performance of a Micro Comb Resonator

机译:结构缺陷对微梳谐振器性能的影响

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摘要

A micro comb resonator loaded by alternating electric field is modeled by finite element method, The damping is analyzed by both Couette flow model and Stokes flow model. Structure faults are researched its effects on the dynamic characteristics of the micro comb resonator. The result shows that adhesion fault makes the resonance frequency higher and sensitivity reduction, while crack fault debases the resonance frequency and amplitude. When the crack is located near the end, the stress concentration at the crack location is highest, which is easy to induce the support beam broken.
机译:利用有限元方法对微交谐振器的交变电场进行了建模,并利用库埃特流模型和斯托克斯流模型对阻尼进行了分析。研究了结构故障对微梳谐振器动态特性的影响。结果表明,粘附缺陷使共振频率升高,灵敏度降低,而裂纹缺陷使共振频率和振幅降低。当裂纹位于末端附近时,裂纹位置处的应力集中最高,容易引起支撑梁断裂。

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