...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Mechanical systems and signal processing >Dynamic identification of electrostatically actuated MEMS in the frequency domain
【24h】

Dynamic identification of electrostatically actuated MEMS in the frequency domain

机译：静电驱动MEMS的频域动态识别

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Micro-electro-mechanical systems (MEMS) are commonly constituted by suspended structures such as beams and spring-supported plates and are applied in a wide range of fields such as sensing, optics, radio frequency communications, fluidics, biology, etc. The components that form the basis of MEMS devices are often actuated using electrostatic capacitive strategy, and performances are improved by the micro-scale dielectric gap between the electrodes. The dynamic dimensioning and characterization are made more complicated by the nonlinearity of the electrostatic actuation and by the electro-mechanical coupling, which involves the capacitive force and the elastic reaction of the structure. The dynamic characterization is affected by specific problems related to electro-mechanical coupling, which need a dedicated approach. Some of the effects that take place during the dynamic tests on electrostatically actuated MEMS are studied in this work and are described using compact analytic models; using the proposed approaches, results of experiments in the presence of electro-mechanical coupled domains can be predicted and interpreted correctly. Structural properties such as residual stress or strain dependent on the fabrication process may influence the measurements in both, the static and dynamic fields. The goal of this study is to describe the most common experimental problems related to the dynamic characterization of electrostatically actuated microsystems; theoretical approaches that are able to describe the effects involved are proposed to predict and interpret experimental results.
机译：微机电系统（MEMS）通常由诸如梁和弹簧支撑板之类的悬挂结构构成，并广泛应用于传感，光学，射频通信，流体学，生物学等领域。通常使用静电电容策略来驱动构成MEMS器件基础的器件，并通过电极之间的微米级介电间隙来提高性能。动态尺寸和特征由于静电驱动的非线性和机电耦合而变得更加复杂，机电耦合涉及电容力和结构的弹性反应。动态特性受到与机电耦合有关的特定问题的影响，这些问题需要专用的方法。在这项工作中研究了在动态测试过程中对静电驱动MEMS产生的一些影响，并使用紧凑的分析模型对其进行了描述。使用提出的方法，可以正确预测和解释存在机电耦合域的实验结果。取决于制造过程的结构特性（例如残余应力或应变）可能会影响静态和动态场的测量。这项研究的目的是描述与静电驱动微系统的动态特性相关的最常见的实验问题。提出了能够描述所涉及的影响的理论方法来预测和解释实验结果。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号