In this study, a dynamics model equation of double-bottom-plate MEMS torsional micromirror system under an electrostatic drive was established and its static and dynamic bifurcation phenomenon, pull-in characteristics were analyzed through numerical solution in phase space. The zero damping cases were also analyzed by Hamiltonian method. Results show that the phenomena of saddle-node and fork bifurcation are related to pull-in characteristics; Hopf bifurcation is observed when analyzing dynamic characteristic change with damping; dynamic pull-in voltage is always lower than static pull-in voltage, and increases with voltage ratio or damping; dynamic pull-in voltage increases with damping and will saturate at static pull-in voltage;maximum deflection angle decreases along with the increase of damping under the same driving voltage. The research method and conclusions can be used for reference in the analysis of the torsional micromirror system.%建立了静电驱动的双下极板MEMS扭转微镜系统的动力学模型方程,通过其状态空间方程的数值解,在相空间对静态及动态的分岔现象、吸合特性进行分析,并利用哈密顿函数法在阻尼为零时与相空间分析结果进行了对比验证.研究表明,双下极板扭转微镜系统中观察到的鞍结分岔、叉式分岔与系统的吸合失稳之间有明显的对应关系;在对系统动态特性分析的过程中,随阻尼变化观察到动态霍夫分岔;微镜系统动态吸合电压总小于静态吸合电压,且随阻尼、电压比升高;动态吸合电压随阻尼增大并最终接近饱和,饱和值为静态吸合电压;在相同的驱动电压下,最大偏转角随阻尼的升高而降低.研究方法和结论对静电驱动的扭转微镜系统的分析有借鉴作用.
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