Design and fabrication 1-D electrostatically actuated torsional MEMS micro-mirror based on SU-8

机译：基于SU-8的设计和制造1-D静电驱动扭转MEMS微镜

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This paper presents a model to design and fabricate 1-D torsional micro-mirror which is made by SU-8 photoresist. The torsional micro-mirror consists of a mirror plate, bases for installing mirror, and two electrodes. Mirror plate and bases were made by SU-8. The torsional angle and deflection tests were studied and results were shown below.

机译：本文介绍了设计和制造1-D扭转微镜的模型，该模型由SU-8光刻胶制成。扭转微镜由镜板，用于安装镜子的碱和两个电极。镜板和碱由SU-8制成。研究了扭转角度和挠曲测试，结果如下所示。

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《EOS conference on manufacturing of optical components》|2011年||共2页
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M. Khalafi; H. Latifi; M. Ghaderi; I. Sabri; A. Moazenzadeh;
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Design and fabrication 1-D electrostatically actuated torsional MEMS micro-mirror based on SU-8

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