This dissertation work presents three aspects of research efforts in design, fabrication (MUMPs Process), and characterization of the following MEMS (Micro Electro Mechanical System) devices: 1. Polysilicon and electroplated nickel V-shape and modified U-shape actuators (VSA and mUSA). 2. Electroplated nickel micro-grippers with and without capacitive position sensor. 3. Polysilicon and electroplated nickel micro-switches with two novel mechanical push-pull latching mechanisms.;The modification of the angle between the hot and cold arms of the Guckel U-shape actuator from 0° to +/-theta° in the mUSA facilitates the desired in-plane directional displacement and buckling force. Two mUSAs are uniquely integrated to create a symmetric structure of the VSA to meet the above mentioned critical requirements. At operating voltage/power of 1.0 V/ 0.67 W, in-plane displacement of ∼13.5 mum and pushing force of ∼7.4 mN were measured at the tip of the nickel VSA. Also, at 1.0 V/2.2 mW, in-plane displacement of ∼2.5 mum and force of ∼240 muN were measured at the tip of the polysilicon VSA.;Proprietary polysilicon and nickel micro-switches with two unique latching mechanisms have been designed and implemented. The VSA and mUSA have been used to provide the desired displacement and force in the contact and latching mechanisms of the micro-switches. The latching mechanism reduces the total electrical energy consumed by the micro-switch since it consumes power only when it changes the state.;A unique nickel micro-gripper electrothermally driven by a VSA and two mUSAs has been designed and implemented. This configuration distinguishes the micro-gripper from others in its ability to generate larger tip displacement and greater holding force. At operating voltage/power of 1.0 V/ 0.85 W, tip opening of ∼173.4 mum and holding force of ∼6.0 mN were measured in the micro-gripper. The out-of-plane z-displacement was maintained less than ∼0.5 mum at the gripper tips.;The VSA and mUSA have been designed and implemented to improve the electrothermo-mechanical characteristics of the existing thermal actuators in order to achieve the critical requirements of: better guided and amplified in-plane directional displacements and forces, minimized out of plane z-displacement, and faster mechanical initialization.
展开▼
机译：本论文的工作介绍了以下MEMS（微机电系统）器件在设计，制造（MUMPs工艺）和特性方面的研究工作的三个方面：1.多晶硅和电镀镍V型和改进的U型执行器（VSA和mUSA）。 2.带有和不带有电容式位置传感器的电镀镍微型夹具。 3.带有两个新颖的机械推挽式闩锁机制的多晶硅和电镀镍微动开关。；在mUSA中，将Guckel U形执行器的热臂和冷臂之间的角度从0°更改为+/-θ°有助于所需的平面内方向位移和屈曲力。两个mUSA独特地集成在一起，以创建VSA的对称结构，以满足上述关键要求。在1.0 V / 0.67 W的工作电压/功率下，在镍VSA的尖端测得的面内位移约为13.5 mm，推力约为7.4 mN。同样，在1.0 V / 2.2 mW的条件下，在多晶硅VSA的尖端测得的面内位移为〜2.5 mm，力为〜240μN。设计了具有两个独特闩锁机制的专有多晶硅和镍微动开关，并且已实施。 VSA和mUSA已用于在微动开关的接触和闩锁机构中提供所需的位移和力。闭锁机构减少了微动开关消耗的总电能，因为它仅在改变状态时才消耗功率。设计并实现了由VSA和两个mUSAs电热驱动的独特的镍微夹持器。这种构造使微型夹持器在产生更大的尖端位移和更大的夹持力方面与众不同。在1.0 V / 0.85 W的工作电压/功率下，在微型夹具中测得的尖端开度约为173.4 mum，保持力约为6.0 mN。夹持器尖端的平面外z位移保持在小于约0.5毫米。; VSA和mUSA的设计和实施旨在改善现有热执行器的电热机械特性，以满足关键要求的优点：更好地引导和放大了平面内方向位移和力，使平面外z位移最小化，并加快了机械初始化速度。
展开▼
