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首页> 外文期刊>Electrophoresis: The Official Journal of the International Electrophoresis Society >Design, fabrication and characterization of nano-filters in silicon microfluidic channels based on MEMS technology.
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Design, fabrication and characterization of nano-filters in silicon microfluidic channels based on MEMS technology.

机译：基于MEMS技术的硅微流体通道中纳米过滤器的设计，制造和表征。

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摘要

Since most clinical assays are performed on cell-free serum or plasma, micro-analytical systems for blood tests require integrated on-chip microfluidics for the isolation of plasma or serum from crude blood samples. In this paper, we present a crossflow filtration method using novel silicon nano-filters for plasma separation. The microfluidic chip is made of a silicon substrate containing micropillar arrays, feed channels, side channels and nano-gap structures, sealed with a PDMS-glass compound cover. The design of the silicon filtration structures were optimized using numerical analysis and the optimal MEMS fabrication procedures were obtained. The filtration structures including nano-filters were characterized using SEM and subsequently used to isolate plasma from whole blood in a continuous manner. Compared with micro-gap structures in silicon microfluidic channels, the nano-gap structures have been used to separate plasma from whole blood samples with higher selectivity, where a maximum plasma selectivity of 97.7% has been obtained. Common problems of clogging and jamming in filtration applications have seldom been noticed in our device. The presented microfluidic filtration device for plasma isolation could be integrated into microTAS for point-of-care diagnostics in the near future.
机译：由于大多数临床分析都是在无细胞的血清或血浆上进行的，因此用于血液测试的微分析系统需要集成的片上微流控技术，以从粗血样品中分离血浆或血清。在本文中，我们提出了一种使用新型硅纳米过滤器进行等离子体分离的错流过滤方法。微流控芯片由硅基板制成，该基板包含微柱阵列，进料通道，侧通道和纳米间隙结构，并用PDMS玻璃复合盖密封。通过数值分析优化了硅过滤结构的设计，并获得了最佳的MEMS制造工艺。使用SEM对包括纳米过滤器的过滤结构进行表征，随后将其用于以连续方式从全血中分离血浆。与硅微流体通道中的微间隙结构相比，纳米间隙结构已被用于以更高的选择性从全血样品中分离血浆，其中最大血浆选择性为97.7％。在我们的设备中很少注意到过滤应用中常见的堵塞和堵塞问题。提出的用于血浆分离的微流过滤设备可以在不久的将来集成到microTAS中，以进行即时诊断。

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