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Nanometer positioning of a linear motion stage under static loads

机译：静态载荷下线性运动平台的纳米定位

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A standard lead-screw-driven linear translation table was fitted with a secondary voice coil actuator, which can apply forces of /spl plusmn/0.5 N on the translating stage. The DC servomotor-driven lead screw is capable of positioning the table to a nominal precision of /spl plusmn/0.5 /spl mu/m. The secondary actuator then positions the table to /spl plusmn/1 mm. Both actuators utilize closed-loop feedback algorithms. This configuration has significant advantages over the more common "piggyback" arrangement, which often uses piezoelectric actuators. The advantages include preservation of the original load surface and position sensors and an easier to control actuator. Its ability to operate under static load and a model of the microdynamic behavior are addressed in this paper. When static loads of up to 36 N were applied to the translating stage, the secondary actuator could still displace the table to /spl plusmn/500 nm and control the position down to its zero-load precision. The microdynamic behavior in this region is nonlinear and was modeled using the modified Dahl model of friction. The key parameters in the model were identified using a 2 Hz sinusoidal input force with varying amplitudes from the secondary actuator. For a constant loading force, the parameters did not vary significantly with different excitation forces. The friction parameter relating the initial slope of the friction force versus displacement curve did change with different loading forces. Also, for smaller input signals causing displacements of less than 200 nm, the friction parameters would tend to drift, depending on input magnitudes.
机译：标准的导螺杆驱动的线性移动工作台配有辅助音圈致动器，可在平移台上施加/ spl plusmn / 0.5 N的力。直流伺服电机驱动的丝杠能够将工作台定位到/ spl plusmn / 0.5 / spl mu / m的标称精度。然后，第二个执行器将工作台定位到/ spl plusmn / 1 mm。两个执行器均采用闭环反馈算法。与通常使用压电致动器的更常见的“背负式”布置相比，该配置具有明显的优势。优点包括保留了原始的载荷表面和位置传感器，并且易于控制执行器。本文讨论了其在静态负载下的运行能力以及微动力行为模型。当将最大36 N的静态负载施加到平移台上时，辅助执行器仍可以将工作台移动到/ spl plusmn / 500 nm，并将位置降低到其零负载精度。该区域的微观动力学行为是非线性的，并使用改进的Dahl摩擦模型建模。该模型中的关键参数是使用一个2 Hz正弦输入力来确定的，该输入力的大小来自次级执行器。对于恒定的加载力，参数在不同的激励力下不会显着变化。与摩擦力相对于位移曲线的初始斜率相关的摩擦参数确实随着不同的加载力而变化。同样，对于较小的输入信号（导致位移小于200 nm），根据输入幅度，摩擦参数将趋于漂移。

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