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首页> 外文期刊>IEEE / ASME Transactions on Mechatronics >A Contactless Stage Based on Near-Field Acoustic Levitation for Object Handling and Positioning—Concept, Design, Modeling, and Experiments
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A Contactless Stage Based on Near-Field Acoustic Levitation for Object Handling and Positioning—Concept, Design, Modeling, and Experiments

机译：基于近场声悬浮的非接触平台，用于物体处理和定位—概念，设计，建模和实验

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摘要

A technology demonstrating a stage capable of positioning an object in the X-Y plane and performing rotation on a thin layer of air without contact is presented. By creating ultrasonic vibrations in an annulus structure, a thin air layer develops a dynamic acoustic pressure field able to levitate a planar object and to control its position. Motion is obtained by creating traveling pressure waves within the acoustic field giving rise to directional forces acting on the levitated object. The novel configuration is based on three independent acoustic levitation motors. Each capable of levitating and positioning the object simultaneously. Closed-loop control of the object's position is made possible by incorporating several sensors. In particular, the motion and rotation of the mirror-like reflective surface such as the silicon wafers were realized with optical sensors based on a laser mouse. The necessary forces for manipulating the acoustic vibrations and, therefore, the pressure fields are generated by an H-infinity controller. The controller is robust enough to handle the strong coupling of the system and the model uncertainties. A laboratory prototype in which the concept was developed is described and validated by a series of experiments. This paper demonstrates the ability of the acoustic levitation systems to manipulate objects without contact.
机译：提出了一种技术，该技术展示了能够将物体定位在X-Y平面上并在空气薄层上无接触地旋转的平台。通过在环空结构中产生超声振动，薄的空气层会形成动态声压场，该声压场能够使平面物体悬浮并控制其位置。通过在声场内产生行进压力波来获得运动，从而引起作用在悬浮物体上的方向力。新颖的配置基于三个独立的声悬浮电动机。每个都可以同时悬浮和定位对象。通过集成多个传感器，可以对对象位置进行闭环控制。特别地，利用基于激光鼠标的光学传感器来实现诸如硅晶片之类的镜面反射表面的运动和旋转。一个H-infinity控制器会产生必要的力，以控制声振动，从而控制压力场。控制器具有足够的鲁棒性，可以处理系统的强耦合和模型不确定性。描述了开发该概念的实验室原型，并通过一系列实验对其进行了验证。本文演示了声悬浮系统无接触地操纵物体的能力。

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