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System Design and Control of a Resonant Fast Steering Mirror for Lissajous-Based Scanning

机译:基于李萨如的扫描共振快速转向镜的系统设计和控制

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摘要

This paper introduces a system and controller design of an electromagnetically actuated fast steering mirror (FSM) tailored for Lissajous trajectories. The proposed system enables an improved performance in terms of energy consumption and tracking precision. By individually tuning the stiffness of each scan axis of the proposed FSM system, the resonance frequencies are placed at the drive frequencies of the desired Lissajous trajectory. The design of a dual tone controller for feedback control is presented, and matched to the scanning trajectory and the tuned FSM dynamics. It is shown that compared with a state-of-the-art FSM system, the energy consumption can be reduced by a factor of 100 using the modified system structure and the dual tone controller. Vice versa, the maximum scan area is enlarged by a factor of 60. The resulting root mean square tracking error can be reduced by 48% as compared with the conventional FSM system.
机译:本文介绍了针对李萨如(Lissajous)轨迹量身定制的电磁致动快速转向镜(FSM)的系统和控制器设计。所提出的系统在能量消耗和跟踪精度方面实现了改进的性能。通过单独调节所提出的FSM系统的每个扫描轴的刚度,将谐振频率置于所需的李沙育轨迹的驱动频率处。提出了一种用于反馈控制的双音控制器的设计,并将其与扫描轨迹和调整后的FSM动态匹配。结果表明,与最新的FSM系统相比,使用改进的系统结构和双音调控制器可以将能耗降低100倍。反之亦然,最大扫描区域扩大了60倍。与传统的FSM系统相比,所产生的均方根跟踪误差可减少48%。

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