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首页> 外文期刊>Zeitschrift fur Arznei- und Gewurzpflanzen >Integration of Control Design and System Operation of a High Performance Piezo-Actuated Fast Steering Mirror
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Integration of Control Design and System Operation of a High Performance Piezo-Actuated Fast Steering Mirror

机译：高性能压电驱动快速转向镜的控制设计与系统运行的集成

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摘要

This article presents a novel piezo-actuated fast steering mirror (FSM) and focuses on the integration of control design and system operation in order to improve its tracking performance for high-speed scanning. The FSM is centered around a membrane-like flexure design and two pairs of stack actuators operated in a push-pull configuration, employing an optical sensor for position measurement. With the flexure membrane, the first fundamental resonance mode is placed as high as 6.7 kHz, while still enabling an angular range of $pm$2.4 mrad mechanical. This results in the highest performance metric given by the product of mechanical range times main resonance mode frequency reported for piezo FSMs so far. To improve the tracking performance under high-speed scanning compared to a conventional raster scan operation, an integrated control and trajectory design yields a Lissajous trajectory together with tailored single tone and dual tone feedback controllers. It is demonstrated that in the Lissajous scan case, the rms tracking error can be reduced by one order of magnitude, as compared to the conventional raster scan case with a PI+ controller providing a closed-loop bandwidth of 2.7 kHz.
机译：本文提出了一种新型压电驱动的快速转向镜（FSM），并专注于控制设计和系统操作的集成，以提高其高速扫描的跟踪性能。 FSM以膜状弯曲设计为中心，两对堆叠致动器，在推挽式配置中操作，采用光学传感器进行定位测量。通过挠性膜，第一基本谐振模式高达6.7 kHz，同时仍然能够实现$ 2.4MRAD机械的角度范围。这导致最高性能度量由迄今为止Piezo FSM的主谐振模式频率的机械范围倍的乘积。为了改善高速扫描下的跟踪性能与传统的光栅扫描操作相比，集成控制和轨迹设计会产生Lissajous轨迹以及定制的单音和双音反馈控制器。据证明，与具有PI +控制器的传统光栅扫描箱相比，在Lissajous扫描箱中，可以减少一个级别的级别，从而提供2.7kHz的闭环带宽。

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