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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Integrated Servo-Mechanical Design of a Fine Stage for a Coarse/Fine Dual-Stage Positioning System
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Integrated Servo-Mechanical Design of a Fine Stage for a Coarse/Fine Dual-Stage Positioning System

机译：粗/细双阶段定位系统精细平台的集成伺服机械设计

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摘要

Traditionally, the coarse and fine mechanical stages within a dual-stage positioning system are designed separately without consideration about their control performance in dual-stage integration. In this paper, a flexure-based Lorentz motor fine stage is designed concurrently with a simple PID controller to perform the dual-stage positioning, based on the existing coarse stage. The design of fine stage is carried out using a proposed integrated servo-mechanical design approach, where various specifications are considered and formulated as constraints in an optimization problem. Through the approach, both the plant modal parameters and controller parameters of fine stage are concurrently solved. It demonstrates that through suitable mechanical plant design, the fine stage can fulfill various control specifications by only using a simple PID controller, e.g., to compensate sensitivity peak, maintain stability, etc. Meanwhile, the proposed design approach also ensures certain open-loop positioning performance and the decoupling property of coarse/fine stages. The prototype of designed fine stage is fabricated, and experimental investigation indicates that the sensitivity peak is effectively reduced from 14.5 dB of coarse stage to 7.1 dB in the dual-stage system, and the fine stage is able to achieve submicrometer accuracy. The maximal tracking error is also reduced significantly from about 20 m via the coarse stage to less than 2 m through dual-stage positioning.
机译：传统上，双级定位系统中的粗机械级和精机械级是分开设计的，而不考虑它们在双级集成中的控制性能。在本文中，基于现有的粗级，同时设计了基于挠曲的洛伦兹电机精细级和一个简单的PID控制器来执行双级定位。精细阶段的设计是使用提出的集成伺服机械设计方法进行的，其中考虑了各种规格并将其制定为优化问题的约束。通过该方法，可以同时求解精细阶段的工厂模态参数和控制器参数。结果表明，通过适当的机械设备设计，仅使用简单的PID控制器就可以实现精细级的各种控制规格，例如，补偿灵敏度峰值，保持稳定性等。同时，所提出的设计方法还确保了一定的开环定位性能和粗/细级的解耦特性。制作了设计好的微台原型，实验研究表明，在双级系统中，灵敏度峰值从粗台的14.5 dB有效降低到7.1 dB，并且微台能够达到亚微米精度。最大跟踪误差也从粗糙级的约20 m显着降低到双级定位的2 m以下。

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