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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Electrostatic Torsional Micromirror With Enhanced Tilting Angle Using Active Control Methods
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Electrostatic Torsional Micromirror With Enhanced Tilting Angle Using Active Control Methods

机译：采用主动控制方法的具有倾斜角的静电扭转微镜

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摘要

Electrostatic microelectromechanical systems (MEMS)-based torsional micromirrors are a fundamental building block for many optical network applications, such as optical wavelength-selective switches, configurable optical add-drop multiplexers and optical cross-connects. Although the device architecture, materials and fabrication processes determine the micromirrors’ functioning space, one major technical challenge to achieving their full performance potentials is the controllability and stability of the tilting angle. In this paper, an electrostatic micromirror is designed and fabricated using a standard MEMS silicon-on-insulator (SOI) process. Active control approaches including gain scheduling and nonlinear proportional and derivative (PD) control are proposed. Both approaches can improve the performance of the mirror tilting and enhance the robustness of the structures to any stochastic perturbations. Furthermore, the nonlinear PD control can eliminate the micromirror “pull-in” phenomenon, hence significantly expanding the mirror tilt range, and as a result achieving enhanced device performance and functionality. The nonlinear PD control method is experimentally implemented and the results demonstrate the effectiveness of the approach.
机译：基于静电微机电系统（MEMS）的扭转微镜是许多光网络应用的基本构件，例如光波长选择开关，可配置的光分插复用器和光交叉连接。尽管设备的架构，材料和制造工艺决定了微镜的功能空间，但要实现其全部性能潜力，一项主要的技术挑战是倾斜角的可控性和稳定性。在本文中，采用标准的MEMS绝缘体上硅（SOI）工艺设计和制造了静电微镜。提出了包括增益调度和非线性比例与微分（PD）控制在内的主动控制方法。两种方法都可以提高反射镜倾斜的性能，并增强结构对任何随机扰动的鲁棒性。此外，非线性PD控制可以消除微镜的“拉入”现象，从而显着扩大镜的倾斜范围，从而实现增强的设备性能和功能。通过实验实现了非线性局部放电控制方法，结果证明了该方法的有效性。

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