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首页> 外文期刊>Journal of Microelectromechanical Systems >Development of 3D Fused Quartz Hemi-Toroidal Shells for High-Q Resonators and Gyroscopes
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Development of 3D Fused Quartz Hemi-Toroidal Shells for High-Q Resonators and Gyroscopes

机译：用于高Q谐振器和陀螺仪的3D熔融石英半环形壳的开发

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In this paper, recent developments in the design and fabrication of micromachined fused quartz hemi-toroidal shells are presented. The fabrication is based on micro glassblowing process, demonstrated to enable the realization of high-Q MEMS resonators and gyroscopes. The design optimization of the shell geometry is performed using parametric finite element analysis. The effect of geometric parameters on the scaling of the resonant frequencies and energy dissipation are discussed. Three variations of the micro-glassblowing process are studied in the paper, concluding that shell resonators with a broad operational frequency range without losing the symmetry and Q-factor are feasible. Finite element models are presented to simulate the presented glassblowing processes, which are used to predict the final geometry of shell resonators accurately. Operational frequency as low as 5 kHz and Q-factor as high as 1.7 million is demonstrated on the fabricated shell resonators. The proposed process modifications demonstrate a low-cost and scalable fabrication of 3D shells for resonators and gyroscopes, which can be used in inertial navigation and timing applications. [2019-0179]
机译：本文介绍了微加工熔融石英半环形壳的设计和制造的最新进展。该制造基于微玻璃吹制工艺，经证实可实现高Q MEMS谐振器和陀螺仪。壳体几何形状的设计优化是使用参数有限元分析进行的。讨论了几何参数对谐振频率的缩放和能量耗散的影响。本文研究了微玻璃吹塑工艺的三个变体，认为在不损失对称性和Q因子的情况下，具有宽工作频率范围的壳谐振器是可行的。提出了有限元模型来模拟所提出的玻璃吹制过程，该模型用于精确预测壳谐振器的最终几何形状。在制造的壳谐振器上证明了低至5 kHz的工作频率和高至170万的Q因数。提出的过程修改演示了用于谐振器和陀螺仪的3D外壳的低成本且可扩展的制造，可用于惯性导航和计时应用。 [2019-0179]

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