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首页> 外文期刊>Journal of Microelectromechanical Systems >Approximate Mechanical Properties of Clamped–Clamped Perforated Membranes From $In-Situ$ Deflection Measurements Using a Stylus Profiler
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Approximate Mechanical Properties of Clamped–Clamped Perforated Membranes From $In-Situ$ Deflection Measurements Using a Stylus Profiler

机译：使用手写笔分析器 $ in-steu $ 偏转测量夹紧夹紧的穿孔膜的近似力学性能

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Surface micromachined membranes such as RF-MEMS switches are widely adopted in the field of telecommunication devices and represent nowadays the lowest loss devices for switching and routing RF signals. The knowledge of specific properties of structural materials is crucial for a reliable design of devices with optimized performance. Material properties, like Young's modulus and stress, strongly determine the mechanical behavior of MEMS devices. In this paper, Si(x)Ny/a-Si/SixNy thin film membranes, of different sizes and porosities, were fabricated by unconventional low temperature PECVD, using surface micromachining approach. The tri-layer was characterized by nanoindentation and stress measurements based on wafer curvature method. On the possibility to extract mechanical properties from deflection measurements, to the best of our knowledge, literature seems to lack of analytical solutions of the nonlinear large deflection problem of such membranes. Finite element analysis was used to model the load-deflection response of double-clamped membranes, in agreement with measured data. An approximate empirical function was proposed and validated, for describing the maximum deflection under quasi-point loads. The function was used to determine the stress of the investigated membranes; the relative error between predicted and calculated stress values was in the range 2.1%-8.5% for membranes with lower porosity. [2018-0248]
机译：在电信设备领域中广泛采用诸如RF-MEMS开关的表面微机械膜，并且现在表示用于切换和路由RF信号的最低损耗装置。结构材料的特定性质的知识对于具有优化性能的可靠性设计是至关重要的。材料特性，如杨氏模量和应力，强烈地确定了MEMS器件的机械行为。在本文中，使用表面微机械化方法，通过非传统的低温PECVD制造不同尺寸和孔隙率的Si（x）NY / A-Si /六卷薄膜膜。基于晶片曲率法的纳米茚地段和应力测量，特征在于三层。为了从偏转测量中提取机械性能的可能性，据我们所知，文献似乎缺乏这种膜的非线性大偏转问题的分析解。有限元分析用于模拟双夹膜的载荷偏转响应，同时与测量数据一致。提出和验证了近似的经验函数，用于描述准点负载下的最大偏转。该功能用于确定研究的膜的应力;预测和计算的应力值之间的相对误差为孔隙​​率低的膜的2.1％-8.5％。 [2018-0248]

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