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首页> 外文期刊>Microelectromechanical Systems, Journal of >Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator
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Two-Photon Polymerization Lithography and Laser Doppler Vibrometry of a SU-8-Based Suspended Microchannel Resonator

机译：基于SU-8的悬浮微通道谐振器的双光子聚合光刻和激光多普勒测振法

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摘要

We present the optical realization and characterization of complex suspended microchannel resonator (SMR) for biomechanical sensing applications. We exploit the flexibility of two-photon direct laser writing to optimize a highly versatile fabrication strategy based on a shell-writing procedure with the aim to reduce fabrication time of big inlet/outlet sections compatible with most microfluidic systems for lab-on-chip. Compared with standard microfabrication techniques, requiring several technological steps to obtain suspended hollow structures, this method allows to fabricate complex SMR sensors in only one fabrication step by virtue of its intrinsically 3-D nature. The realized resonant structure was characterized by laser doppler vibrometry, showing good agreement with finite-element methods simulations and an experimental quality factor of the fundamental mode of [2014-0309]
机译：我们介绍了用于生物力学传感应用的复杂悬浮微通道谐振器（SMR）的光学实现和特性。我们利用双光子直接激光写入的灵活性来优化基于壳写入程序的多功能制造策略，目的是减少与大多数芯片实验室微流控系统兼容的大入口/出口部分的制造时间。与标准的微细加工技术相比，该技术需要几个技术步骤来获得悬浮的空心结构，该方法凭借其固有的3D性质，仅需一个制造步骤即可制造复杂的SMR传感器。通过激光多普勒振动法对所实现的共振结构进行了表征，与有限元方法模拟和实验品质因数[2014-0309]的基本模态具有良好的一致性。

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