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首页> 外文期刊>Microelectromechanical Systems, Journal of >Improving the Sensitivity and Bandwidth of In-Plane Capacitive Microaccelerometers Using Compliant Mechanical Amplifiers
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Improving the Sensitivity and Bandwidth of In-Plane Capacitive Microaccelerometers Using Compliant Mechanical Amplifiers

机译：使用兼容的机械放大器改善平面电容式微加速度计的灵敏度和带宽

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摘要

This paper presents a method to enhance both the sensitivity and bandwidth of in-plane capacitive micromachined accelerometers by using compliant mechanical amplifiers, and thus obviating the compromise between the sensitivity and bandwidth. Here, we compare one of the most sensitive single-axis capacitive accelerometers and another with large resonant frequency reported in the literature with the modified designs that include displacement-amplifying compliant mechanisms (DaCMs) occupying the same footprint and under identical conditions. We show that 62% improvement in sensitivity and 34% improvement in bandwidth in the former, and 27% and 25% in the latter can be achieved. Also presented here is a dualaxis accelerometer that uses a suspension that decouples and amplifies the displacements along the two in-plane orthogonal axes. The new design was microfabricated, packaged, and tested. The device is 25-μm thick with the interfinger gap as large as 4 μm. Despite the simplicity of the microfabrication process, the measured axial sensitivity (static) of about 0.58 V/g for both the axes was achieved with a cross-axis sensitivity of less than ±2%. The measured natural frequency along the two in-plane axes was 920 Hz. Displacement amplification of 6.2 was obtained using the DaCMs in the dual-axis accelerometer.
机译：本文提出了一种通过使用兼容的机械放大器来提高平面电容式微机械加速度计的灵敏度和带宽的方法，从而避免了灵敏度和带宽之间的折衷。在这里，我们将最敏感的单轴电容式加速度计之一与文献中报道的另一种具有较大谐振频率的加速度计进行比较，其改进后的设计包括位移放大顺应机构（DaCM），它们占据相同的足迹并且在相同的条件下。我们显示，前者的灵敏度提高了62％，带宽提高了34％，后者提高了27％和25％。这里还介绍了一种双轴加速度计，该加速度计使用了悬架，该悬架解耦并放大了沿两个平面内正交轴的位移。新设计经过微加工，封装和测试。该器件厚度为25μm，指间间隙最大为4μm。尽管微细加工工艺很简单，但两轴的轴向灵敏度（静态）约为0.58 V / g，而跨轴灵敏度却小于±2％。沿着两个面内轴的实测固有频率为920Hz。用双轴加速度计中的DaCM获得了6.2的位移放大。

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